Radiation Effects in Advanced Semiconductor Materials and Devices

  • Cor Claeys
  • Eddy Simoen

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 57)

Table of contents

  1. Front Matter
    Pages I-XXII
  2. Cor Claeys, Eddy Simoen
    Pages 53-108
  3. Cor Claeys, Eddy Simoen
    Pages 109-144
  4. Cor Claeys, Eddy Simoen
    Pages 145-180
  5. Cor Claeys, Eddy Simoen
    Pages 181-244
  6. Cor Claeys, Eddy Simoen
    Pages 281-330
  7. Cor Claeys, Eddy Simoen
    Pages 331-350
  8. Back Matter
    Pages 351-404

About this book

Introduction

In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.

Keywords

Microelectronics Radiation damage Semiconductor Semiconductor devices and circuits Space and nuclear electronics ULSI Technology environment modeling

Authors and affiliations

  • Cor Claeys
    • 1
  • Eddy Simoen
    • 1
  1. 1.IMEC Leuven/BelgiumLeuvenBelgium

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-04974-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 2002
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-07778-4
  • Online ISBN 978-3-662-04974-7
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book
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