Abstract
The semiconductor component and circuit operation in a radiation environment, as outlined in Chap. 1, is generally subjected to a mix of particles and photons, with quite a range of energies. Upon its trajectory through the material, a high-energy nuclear particle or photon may lose its kinetic energy in different ways, thereby creating various types of damage. This chapter describes the different interaction and damage mechanisms. Roughly speaking, they can be divided into ionisation and displacement damage effects, which are discussed in the Sect. 2.2. The impact of both damage mechanisms on material and device parameters and characteristics is the subject of Sect. 2.3. Examples are given for the case of silicon and the silicon-silicondioxide (Si-Si02) interface, as they are the dominant systems in advanced microelectronics and, therefore, also the best studied. Whenever relevant, results for other semiconductor materials (Ge, GaAs,...) are given. Specific damage mechanisms for III-V and opto-electronic components are addressed in the chapters dealing with these applications. In Sect. 2.4, a brief description is provided of the most powerful spectroscopic techniques, enabling a microscopic study of the radiation-induced defects. Final conclusions are drawn in Sect. 2.5.
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References
Van Lint VA, Flanahan TM, Leadon RE, Naber JA, Rogers VC (1980) Mechanisms of radiation effects in electronic materials. Wiley Interscience, New York
Ma TP, Dressendorfer PV (1989) Ionizing radiation effects in MOS devices and circuits. Wiley Interscience, New York
Adams L, Holmes-Siedle A (1993) Handbook of radiation effects. Oxford Scientific Publishers, Oxford
McLean FB, Oldham TR (1987) Basic mechanisms of radiation effects in electronic materials and devices. US Army Lab Command, HDL-TR-2129. US Army Command, Harry Diamond Laboratories, MD, USA
Oldham TR, McLean FB, Boesch Jr HE, McGarrity JM (1989) An overview of radiation-induced interface traps in MOS structures. Semicond Sci Technol 4: 986–999
Heijne EHM (1985) The use of semiconductor imagers in high energy particle physics. In: Proc SPIE Solid State Imagers Appl, vol 591, pp 2–11
Privitera V, Coffa S, Priolo F, Rimini E (1998) Migration and interaction of point defects at room temperature in crystalline silicon. Rivista del Nuovo Cimento 21: 1–52
Brotherton SD, Bradley P (1982) Defect production and lifetime control in electron and y-irradiated silicon. J Appl Phys 53: 5720–5732
Buisson J, Gaillard R, Jaureguy J-C, Poirault G (1996) Effet de déplacement induit par les protons de grande énergie dans les dispositifs électroniques semi-conducteurs. In: Proc RADECS ‘85. The IEEE, New York, pp 19–24
Dale C, Marshall P (1991) Displacement damage in Si imagers for space applications. In: Proc SPIE Charged-Coupled Devices and Solid State Optical Sensors II, vol 1447, pp 70–86
Meese JM (1981) A review of NTD-induced defects in silicon. In: Narayan J, Tan TY (eds) Defects in Semiconductors. North-Holland, Amsterdam, pp 225–240
Dreier P (1990) High resistivity silicon for detector applications. Mud. Instrum Methods A288: 272–277
Claeys C, Simoen E, Vanhellemont J (1996) Lattice defects in high resistivity silicon. In: Claeys CL, Rai-Choudhury P, Stallhofer P, Maurits JE (eds) Proc Fourth International Symposium on High Purity Silicon. The Electrochem Soc, Pennington, NJ, vol 96–13, pp 305–324
Haller EE, Itoh KM, Beeman JW (1996) Neutron transmutation doped (NTD) germanium thermistors for sub-mm bolometer applications. In: Proc 30th ESLAB Symposium on Submillimetre and Far-Infrared Space Instrumentation, ESA SP-388, pp 115–118
Ziegler JF, Biersack JP, Littmark U (1985) The Stopping Range of Ions in Solids. Pergamon, New York
Linnros J, Norlin P, Hallén A (1991) Depth resolved carrier lifetime measurements of proton irradiated thyristors. In: IEDM Tech Digest. The IEEE, New York, pp 157–160
Mapper D, Sanderson TK, Stephen JH, Farren J, Adams L, Harboe-Sorensen R (1985) An experimental study of the effect of absorbers on the LET of the fission particles emitted by Cf-252. IEEE Trans Nucl Sci 32: 4276–4281
Vanhellemont J, Simoen E, Claeys C, Kaniava A, Gaubas E, Bosman G, Johlander B, Adams L, Clauws P (1994) On the impact of low fluence irradiation with MeV particles on silicon diode characteristics and related material properties. IEEE Trans Nucl Sci 41: 1924–1931
Marshall PW, Dale CJ, Summers GP, Wolicki EA, Burke EA (1989) Proton, neutron and electron-induced displacement damage in germanium. IEEE Trans Nucl Sci 36: 1882–1888
Goubet JJ, Stievenard D, Mathiot D, Zazoui M (1992) Electron-irradiation-induced defects in Si-Ge alloys. Phys Rev B 46: 10113–10118
Summers GP, Burke EA, Xapsos MA, Dale CJ, Marshall PW, Petersen EL (1988) Displacement damage in GaAs structures. IEEE Trans Nucl Sci 35: 1221–1226
Summers GP, Burke EA, Shapiro P, Messenger SR, Walters RJ (1993) Damage correlations in semiconductors exposed to gamma, electron and proton radiations. IEEE Trans Nucl Sci 40: 1372–1379
Dale CJ, Marshall PW, Summers GP, Wolicki EA, Burke EA (1989) Displacement damage equivalent to dose in silicon devices. Appl Phys Lett 54: 451–453
Dale CJ, Marshall PW, Burke EA, Summers GP, Bender GE (1989) The generation lifetime damage factor and its variance in silicon. IEEE Trans Nucl Sci 36: 1872–1881
Petersen E (1981) Soft errors due to protons in the radiation belt. IEEE Trans Nucl Sci 28: 3981–3986
McLean FB, Oldham TR (1982) Charge funneling in n-and p-type Si substrates IEEE Trans Nucl Sci 29: 2018–2020
McNulty PJ, Roth DR, Beauvias WJ, Abdel-Kader WG, Dinge DC (1991) Comparison of the charge collection properties of junctions and the SEU response of microelectronic circuits. Nucl Tracks Radiat Measurements 19: 929–938
Iwata H, Ohzone T (1995) Numerical simulation of single event latchup in the temperature range 77 — 450 K. IEEE Trans Nucl Sci 42: 148–154
Srour JR, McGarrity JM (1988) Radiation effects on microelectronics. Proc IEEE 76: 1443–1469
Boesch Jr HE, McGarrity JM (1976) Charge yield and dose effects in MOS capacitors at 80 K. IEEE Trans Nucl Sci 23: 1520–1525
Boesch Jr HE, Dunn GJ (1991) Hole transport in SiO2 and reoxidized nitrided SiO2 gate insulators at low temperatures. IEEE Trans Nucl Sci 38: 1083–1088
Klein RB, Saks NS, Shanfeld Z (1990) Saturation of radiation-induced threshold-voltage shifts in thin-oxide MOSFETs at 80 K IEEE Trans Nucl Sci 37: 1690–1695
Zupac D, Galloway KF, Schrimpf RD, Augier P (1993) Radiation-induced mobility degradation in p-channel double-diffused metal-oxide-semiconductor power transistors at 300 and 77 K. J Appl Phys 73: 2910–2915
McWhorter PJ, Winokur PS (1986) Simple technique for separating the effects of interface traps and trapped-oxide charge in metal-oxide-semiconductor transistors. Appl Phys Lett 48: 133–135
Witczak SC, Winokur PS, Lacoe RC, Mayer DC (2000) Charge separation technique for metal-oxide-semiconductor capacitors in the presence of hydrogen deactivated dopants. J Appl Phys 87: 8206–8208
Groeseneken G, Maes HE, Beltran N, De Keersmaecker RF (1984) A reliable approach to charge-pumping measurements in MOS transistors. IEEE Trans Electron Devices 31: 42–53
Fleetwood DM, Meisenheimer TL, Scofield JH (1994) 1/f noise and radiation effects in MOS devices. IEEE Trans Electron Devices 41: 1953–1964
Chen W, Balasinski A, Ma T-P (1991) Lateral distribution of radiation-induced damage in MOSFET’s. IEEE Trans Nucl Sci 38: 1124–1129
Balasinski A, Ma T-P (1992) Ionizing radiation damage near CMOS transistor channel edges. IEEE Trans Nucl Sci 39: 1998–2003
Balasinski A, Ma T-P (1993) Impact of radiation-induced nonuniform damage near MOSFET junctions. IEEE Trans Nucl Sci 40: 1286–1292
Acovic A, Dutoit M, Ilegems M (1990) Characterization of hot-electron-stressed MOSFET’ s by low-temperature measurements of the drain tunnel current IEEE Trans Electron Devices 37: 1467–1476
Rosar M, Leroy B, Schweeger G (2000) A new model for the description of gate voltage and temperature dependence of gate induced drain leakage ( GIDL) in the low electric field region. IEEE Trans Electron Devices 47: 154–159
Giebel T, Goser K (1989) Hot-carrier degradation of n-channel MOSFET’s characterized by a gated-diode measurement technique. IEEE Electron Device Lett 10: 76–78
Neugroschel A, Sah C-T, Han KM, Carroll MS, Nishida T, Kavalieros JT, Lu Y (1995) Direct-current measurements of oxide and interface traps on oxidized silicon IEEE Trans Electron Devices 42: 1657–1661
Speckbacher P, Berger J, Asenov A, Koch F, Weber W (1995) The “gated-diode” configuration in MOSFET’ s, A sensitive tool for characterizing hot-carrier degradation. IEEE Trans Electron Devices 42: 1287–1295
Okhonin S, Hessler T, Dutoit M (1996) Comparison of gate-induced drain leakage and charge pumping measurements for determining lateral interface trap profiles in electrically stressed MOSFET’s. IEEE Trans Electron Devices 43: 605–611
Fitzgerald DJ, Grove AS (1968) Surface recombination in semiconductors. Surface Science 9: 347–369
Becker C, Gössling C, Lichau C, Wübben T, Wüstenfeld J, Wunstorf R (2000) Gate-controlled diodes for characterization of the Si-SiO2 interface with respect to surface effects of silicon detectors. Nucl Instrum Methods in Physics Research A 444: 605–613
Mogro-Campero A, Chang MF, Benjamin JL (1988) Resistance changes in silicon by MeV proton implantation. J Electrochem Soc 135: 172–176
Ntsoenzok E, Barbot JF, Desgardin P, Vernois J, Blanchard C, Isabelle DB (1994) Study of the defects induced in n-type silicon irradiated by 1–3 MeV protons IEEE Trans Nucl Sci 41: 1932–1936
Ntsoenzok E, Desgardin P, Saillard M, Vernois J, Barbot JF (1996) Evolution of shallow donors with proton fluence in n-type silicon. J Appl Phys 79: 8274–8277
Yamaguchi M, Taylor SJ, Yang M-J, Matsuda S, Kawasaki O, Hisamatsu T (1996) High-energy and high-fluence proton irradiation effects in silicon solar cells. J Appl Phys 80: 4916–4920
Matsuura H, Uchida Y, Nagai N, Hisamatsu T, Aburaya T, Matsuda S (2000) Temperature dependence of the electron concentration in type-converted silicon by 1x1017 cm−2 fluence irradiation of 1 MeV electrons. Appl Phys Lett 76: 2092–2094
Keskitalo N, Hallén A (1994) Resistivity profile measurements of proton-irradiated n-type silicon. Solid-State Electron 37: 55–60
Lemeilleur F, Glaser M, Heijne EHM, Jarron P, Occelli E (1992) Neutron-induced radiation damage in silicon detectors. IEEE Trans Nucl Sci 39: 551–557
Bates SJ, Dezillie B, Furetta C, Glaser M, Lemeilleur F, León-Florian E (1996) Proton irradiation of various resistivity silicon detectors IEEE Trans Nucl Sci 43: 1002–1008
Li J (1989) Novel semiconductor substrate formed by hydrogen ion implantation into silicon. Appl Phys Lett 55: 2223–2224
Li J (2000) The new exploration for proton-implanted silicon: the conversion of a surface-region-purification-induced p-n junction into a p-i-n electrical structure approaching silicon-on-insulator. Semicond Sci Technol 15: L6 - L9
Wu YH, Chin A, Shih KH, Wu CC, Liao CP, Pai SC, Chi CC (2000) Fabrication of very high resistivity Si with low loss and cross talk. IEEE Electron Device Lett 21: 394396
Privitera V, Coffa S, Priolo F, Kyllesbech Larsen K, Mannino G (1996) Room-temperature migration and interaction of ion beam generated defects in crystalline silicon. Appl Phys Lett 68: 3422–3424
Pease RL, Enlow EW, Dinger GL, Marshall P (1987) Comparison of proton and neutron carrier removal rates. IEEE Trans Nucl Sci 34: 1140–1146
Gossick BR (1959) Disordered region in semiconductors bombarded by fast neutrons. J Appl Phys 30: 1214–1218
Brudnyi VN, Gradoboev AV, Peshev VV (1999) The broad midgap deep-level transient spectroscopy band in proton (65 MeV) and fast neutron-irradiated n-GaAs. Phys Stat Sol (b) 212: 229–239
Fourches N (1995) High defect density regions in neutron irradiated high-purity germanium: Characteristics and formation mechanisms. J Appl Phys 77: 3684–3689
Bruzzi M, Borchi E, Baldini A (1992) Using thermally stimulated currents to visualize defect clusters in neutron-irradiated silicon. J Appl Phys 72: 4007–4013
Watts SJ, Matheson J, Hopkins-Bond IH, Holmes-Siedle A, Mohammadzadeh A, Pace R (1996) A new model for generation-recombination in silicon depletion regions after neutron irradiation IEEE Trans Nucl Sci 43: 2587–2594
Gill K, Hall G, MacEvoy B (1997) Bulk damage effects in irradiated silicon detectors due to clustered divacancies. J Appl Phys 82: 126–136
Schenk A, Krumbein U (1995) Coupled defect-level recombination: Theory and application to anomalous diode characteristics. J Appl Phys 78: 3185–3192
Takarabe K, Landsberg PT, Liakos JK (1997) Recombination statistics involving inter-trap recombination. Semicond Sci Technol 12: 687–691
Giri PK, Mohapatra YN (2000) Capacitance transient spectroscopy models of coupled trapping kinetics among multiple defect states: Application to the study of trapping kinetics of defects in heavy-ion-damaged silicon. Phys Rev B 62: 2496–2504
Svensson BG, Mohadjeri B, Hallén A, Svensson JH, Corbett JW (1991) Divacancy acceptor levels in ion-irradiated silicon. Phys Rev B 43: 2292–2298
Amekura H, Kishimoto N, Saito T (1995) Photoconductivity evolution due to carrier trapping by defects in 17 MeV-proton irradiated silicon. J Appl Phys 77: 4984–4992
Simoen E, Vanhellemont J, Claeys C (1996) Effective generation-recombination parameters in high-energy proton irradiated silicon diodes. Appl Phys Lett 69: 2858–2860
Markvart T (1990) Review: Radiation damage in solar cells. J Mat Sci Mat Electron 1: 1–12
Schroder DK (1990) Semiconductor Material and Device Characterization. WileyInterscience, New York, Chapter 8
Schroder DK (1997) Carrier lifetimes in silicon. IEEE Trans Electron Devices 44:160–170
Bullis WM, Huff HR (1996) Interpretation of carrier recombination and diffusion length measurements in silicon. J Electrochem Soc 143: 1399–1405
Hallén A, Keskitalo N, Masszi F, Ndgl V (1996) Lifetime in proton irradiated silicon. J Appl Phys 79: 3906–3914
Simoen E, Vanhellemont J, Claeys C, Kaniava A, Gaubas E (1996) The response of Si p-n junction diodes to proton irradiations. Semicond Sci Technol 11: 1434–1442
Mogro-Campero A, Love RP, Chang MF, Dyer R (1986) Localized lifetime control in insulated-gate transistors by proton implantation IEEE Trans Electron Devices 33: 1667–1671
Hüppi MW (1990) Proton irradiation of silicon: Complete electrical characterization of the induced recombination centers. J Appl Phys 68: 2702–2707
Hallén A, Bakowski M, Lundqvist M (1993) Multiple proton energy irradiation for improved GTO thyristors. Solid-State Electron 36: 133–141
Simoen E, Claeys C, Ohyama H (1998) Factors determining the damage coefficients and the low-frequency noise in MeV proton-irradiated silicon diodes IEEE Trans Nucl Sci 45: 89–97
Watkins GD (1969) A microscopic view of radiation damage in semiconductors using EPR as a probe. IEEE Trans Nucl Sci 16: 13–18
Lenahan PM, Conley Jr JF (1998) What can electron paramagnetic resonance tell us about the Si/SiO2 system? J Vac Sci Technol B 16: 2134–2153
Henderson B, Pepper M, Vranch RL (1989) Spin-dependent and localisation effects at Si/SiO2 device interfaces. Semicond Sci Technol 4: 1045–1060
Stathis JH (1996) Electrically detected magnetic resonance study of stress-induced leakage current in thin SiO2. Appl Phys Lett 68: 1669–1671
Lepine DJ (1972) Spin dependent recombination in silicon surfaces. Phys Rev B 6: 436441
Krick JT, Lenahan PM, Dunn GJ (1991) Direct observation of interfacial point defects generated by channel hot hole injection in n-channel metal oxide silicon field effect transistors. Appl Phys Lett 59: 3437–3439
Jupina MA, Lenahan PM (1989) A spin dependent recombination study of radiation induced defects at and near the Si/SiO2 interface. IEEE Trans Nucl Sci 36: 1800–1807
Stathis JH, DiMaria DJ (1992) Identification of an interface defect generated by hot electrons in SiO2. Appl Phys Lett 61: 2887–2889
Laiho R, Vlasenko LS, Vlasenko MP, Kozlov VA, Kozlovski VV (1999) Electron paramagnetic resonance of radiation defects in hydrogen-implanted silicon detected by spin-dependent microwave photoconductivity. Appl Phys Lett 74: 3948–3950
Nubile P, Bourgoin JC, Stievenard D, Deresmes D, Strobl G (1992) Defects in low-temperature electron-irradiated p-type silicon. J Appl Phys 72: 2673–2679
Watkins GD, Troxell JR, Chatterjee AP (1979) Vacancies and interstitials in silicon. Inst Phys Conf Ser No 46:Chapter 1, 16–30
Watkins GD (1999) Vacancies and interstitials and their interactions with other defects in silicon, In: Abe T, Bullis WM, Kobayashi S, Lin W, Wagner P (eds) Proc 3rd Int Symposium on Defects in Silicon. The Electrochem Soc, Pennington, NJ, vol 99–1, pp 38–52
Lenahan PM, Conley Jr JF, Wallace BD (1997) A model for hole trapping in SiO2 films on silicon. J Appl Phys 81: 6822–6824
Lenahan PM, Mele JJ, Conley Jr JF, Lowry RK, Woodbury D (1999) Predicting radiation response from process parameters: Verification of a physically based predictive model. IEEE Trans Nucl Sci 46: 1534–1543
Lang DV (1974) Deep-level transient spectroscopy: A new method to characterize traps in semiconductors. J Appl Phys 45: 3023–3032
Benton JL (1990) Characterization of defects in semiconductors by deep level transient spectroscopy. J Cryst Growth 106: 116–126
Johnson NM, Bartelink DJ, Gold RB, Gibbons JF (1979) Constant-capacitance DLTS measurement of defect-density profiles in semiconductors. J Appl Phys 50: 4828–4833
Watts, SJ (1998) Radiation induced defects in silicon. In: Claeys CL, Rai-Choudhury P, Watanabe M, Stallhofer P, Dawson HJ (eds) High Purity Silicon V. The Electrochem Soc, Pennington, NJ, vol 98–13, pp 355–370
Markvart T, Parton DP, Peters JW, Willoughby AFW (1994) DLTS of recombination centres in semiconductors. Materials Science Forum 143–147: 1381–1386
Deixler P, Terry J, Hawkins ID, Evans-Freeman JH, Peaker AR, Rubaldo L, Maude DK, Portal J-C, Dobaczewski L, Bonde Nielsen K, Nylandsted Larsen A, Mesh A (1998) Laplace-transform deep-level transient spectroscopy studies of the G4 gold-hydrogen complex in silicon. Appl Phys Lett 73: 3126–3128
Yao X, Mou J, Qin G (1987) Shifts and splittings of electron energy levels of A centers in silicon under uniaxial stress. Phys Rev B 35: 5734–5739
Samara GA (1987) Pressure dependence of deep electronic levels in semiconductors: The oxygen-vacancy pair (A centre) in silicon. Phys Rev B 36: 4841–4848
Achtziger N, Gottschalk H, Licht T, Meier J, Rüb M, Reislöhner U, Witthuhn W (1995) Recoil implantation of radioactive transition metals and their investigation in silicon by deep-level transient spectroscopy. Appl Phys Lett 66: 2370–2372
Peaker AR, Dobaczewski L, Andersen O, Rubaldo L, Hawkins ID, Bonde Nielsen K, Evans-Freeman JH (2000) Silicon defect characterization by high resolution Laplace Deep Level Transient Spectroscopy. In: Claeys CL, Rai-Choudhury P, Watanabe M, Stallhofer P, Dawson HJ (eds) High Purity Silicon VI, The Electrochem Soc, Pennington, NJ, vol 2000–17, pp 549–560
Goubet JJ, Sherman Christensen J, Mejlholm P, Nylandsted Larsen A (2000) Tin-related deep levels in p-and n-type silicon In: Claeys C (ed) Proc 2nd ENDEASD Workshop, pp 137–142
Watkins GD, Troxell JR (1980) Negative-U properties for point defects in silicon. Phys Rev Lett 44: 593–596
Mukashev BN, Abdullin KhA, Gorelkinskii YuV (1997) Self-interstitials in irradiated silicon. Materials Science Forum 258–263: 541–546
Brelot A (1971) Tin as a vacancy trap in silicon at room temperature IEEE Trans Nucl Sci 19: 220–226
Brelot A, Charlemagne J (1971) Infrared studies of low temperature electron irradiated silicon containing germanium, oxygen and carbon. Radiation Effects 9: 65–73
Svensson JH, Svensson BG, Monenar B (1988) Infrared absorption studies of the divacancy in silicon: New properties of the singly negative charge state. Phys Rev B 38: 4192–4197
Ascheron C (1991) Proton beam modification of selected AIIIBv compounds. Phys Stat Sol A 124: 11–55
Davies G (1989) The optical properties of luminescence centres in silicon. Phys Reports 176: 83–188
Thonke K, Teschner R, Sauer R (1987) New photoluminescence defect spectra in silicon irradiated at 100 K: Observation of interstitial carbon. Solid State Commun 61: 241–244
Nakamura M, Kitamura E, Misawa Y, Suzuki T, Nagai S, Sunaga H (1994) Photoluminescence measurement of carbon in silicon crystals irradiated with high energy electrons. J Electrochem Soc 141: 3576–3579
Nakamura M, Byrne AS, Kitamura E, Suzuki T, Nagai S, Sunaga H, Aoki Y, Naramoto H (1995) Enhanced photoluminescence detection of oxygen in silicon crystal by formation of carbon-oxygen complex through carbon implantation and electron irradiation. J Appl Phys 78: 4407–4410
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Claeys, C., Simoen, E. (2002). Basic Radiation Damage Mechanisms in Semiconductor Materials and Devices. In: Radiation Effects in Advanced Semiconductor Materials and Devices. Springer Series in Materials Science, vol 57. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04974-7_2
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