Overview
- Editors:
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Ingolf Ruge
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Jürgen Graul
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Table of contents (68 papers)
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Implantation into Compound Semiconductors
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- F. L. Vook, S. T. Picraux
Pages 141-150
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- J. L. Merz, L. C. Feldman, D. W. Mingay, W. M. Augustyniak
Pages 182-192
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- J. D. Haskell, W. A. Grant, G. A. Stephens, J. L. Whitton
Pages 193-198
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- A. W. Tinsley, W. A. Grant, G. Carter, M. J. Nobes
Pages 199-204
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- T. G. Williams, D. W. Palmer
Pages 205-211
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Compound and Amorphous Semiconductors
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- B. R. Pruniaux, J. C. North, G. L. Miller
Pages 212-221
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- K. R. Faulkner, A. Todkill
Pages 222-227
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- G. Langguth, E. Lang, O. Meyer
Pages 228-234
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- Y. Shiraki, T. Shimada, K. F. Komatsubara
Pages 235-240
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- J. A. Borders, W. Beezhold
Pages 241-247
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- B. L. Crowder, J. E. Smith Jr., M. H. Brodsky, M. I. Nathan
Pages 255-261
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- D. H. Lee, O. J. Marsh, R. R. Hart
Pages 262-266
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Techniques and Germanium
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- J. W. Mayer, I. V. Mitchell, M.-A. Nicolet
Pages 274-286
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About this book
In recent years great progress has been made in the field of ion implantation, particularly with respect to applications in semiconductors. It would be impos sible not to note the growing interest in this field, both by research groups and those directly concerned with production of devices. Furthermore, as several papers have pointed out, ion implantation and its associated technologies promise exciting advances in the development of new kinds of devices and provide power ful new tools for materials investigations. It was, therefore, appropriate to arrange the II. International Conference on Ion Implantation in Semiconductors within the rather short time of one year since the first conference was held in 1970 in Thousand Oaks, California. Although ori ginally planned on a small scale with a very limited number of participants, more than two hundred scientists from 15 countries participated in the Conference which was held May 24 - 28, 1971 at the Congress Center in Garmisch-Partenkirchen. This volume contains the papers that were presented at the Conference. Due to the tremendous volume of research presented, publication here of all the works in full detail was not possible. Many authors therefore graciously agreed to submit abbreviated versions of their papers.