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Table of contents (19 chapters)
Keywords
About this book
Editors and Affiliations
Bibliographic Information
Book Title: Advances in Rapid Thermal and Integrated Processing
Editors: Fred Roozeboom
Series Title: NATO Science Series E:
DOI: https://doi.org/10.1007/978-94-015-8711-2
Publisher: Springer Dordrecht
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media B.V. 1996
Hardcover ISBN: 978-0-7923-4011-9Published: 31 March 1996
Softcover ISBN: 978-90-481-4696-3Published: 04 December 2010
eBook ISBN: 978-94-015-8711-2Published: 09 March 2013
Series ISSN: 0168-132X
Edition Number: 1
Number of Pages: XII, 566
Topics: Solid State Physics, Spectroscopy and Microscopy, Optical and Electronic Materials, Characterization and Evaluation of Materials
Industry Sectors: Electronics, Energy, Utilities & Environment