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Mechanics and Physics of Precise Vacuum Mechanisms

  • E. A. Deulin
  • V. P. Mikhailov
  • Yu V. Panfilov
  • R. A. Nevshupa

Part of the Fluid Mechanics and Its Applications book series (FMIA, volume 91)

Table of contents

  1. Front Matter
    Pages i-xiv
  2. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 1-19
  3. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 21-32
  4. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 33-67
  5. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 69-86
  6. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 87-136
  7. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 137-166
  8. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 167-184
  9. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 185-207
  10. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 209-223
  11. E. A. Deulin, V. P. Mikhailov, Yu. V. Panfilov, R. A. Nevshupa
    Pages 225-234

About this book

Introduction

In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way.

Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision based on magnetic and electric rheology; precise harmonic rotary and not-coaxial nut-screw linear motion vacuum feedthroughs with technical parameters considered the best in the world; elastically deformed vacuum motion feedthroughs without friction couples usage; the computer system of vacuum mechanisms failure predicting.

This English edition incorporates a number of features which should improve its usefulness as a textbook without changing the basic organization or the general philosophy of presentation of the subject matter of the original Russian work.

Experience at the Bauman Moscow State Technical University and other schools shows that the book will be useful to engineering students who wish to prepare for more advanced studies and applications of vacuum science, technology and its applications.

Keywords

design mechanics mechanism longevity mechanism precision outgassing flow physics of friction reliability vacuum mechanism vacuum technology

Authors and affiliations

  • E. A. Deulin
    • 1
  • V. P. Mikhailov
    • 2
  • Yu V. Panfilov
    • 3
  • R. A. Nevshupa
    • 4
  1. 1.Technical UniversityBauman Moscow StateMoskvaRussian Federation
  2. 2.Technical UniversityBauman Moscow StateMoskvaRussian Federation
  3. 3.Technical UniversityBauman Moscow StateMoskvaRussian Federation
  4. 4.Technical UniversityBauman Moscow StateMoskvaRussian Federation

Bibliographic information

  • DOI https://doi.org/10.1007/978-90-481-2520-3
  • Copyright Information Springer Science+Business Media B.V. 2010
  • Publisher Name Springer, Dordrecht
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-90-481-2519-7
  • Online ISBN 978-90-481-2520-3
  • Series Print ISSN 0926-5112
  • Buy this book on publisher's site
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