Abstract
The required precision of vacuum installations in most technologies (thin film coating, electron beam welding, diffusionwelding) is the same as in traditional engineering industry, but operating conditions of the mechanisms work are much worse, because of vacuum and periodical outgassing baking (see Tables 1.1, 1.2, 1.4). At the same time, the equipment of surface research, electron beam-, ion beam lithography, Table 1.3, atomic force scanning microscopy, Table 1.6, requires much higher precision of the mechanisms, which should work in ultrahigh vacuum (up to 10-9 Pa).
The first peculiarity of vacuum mechanisms is the existence of additional elements in their kinematic chains including: motion feedthroughs, sealing elements, devices for baking, heating elements, holes and grooves on the coupling surfaces for the evacuation of residual gases. All these elements reduce the rigidity of the drives and generate additional disturbing forces that result in the appearance of additional components in the total error. In some cases these new error components can be 10–100 times higher (!) than the errors of basic elements of transmission.
The second peculiarity of vacuum mechanisms is, from one side, the absence of a work load as that is contrast to atmospheric machines and, from another side, the existence of large and non-constant friction forces, additional forces generated by atmospheric pressure, forces generated by deformed sealing elements. It is necessary to emphasize the accidental character of friction forces and their non-linear character as well as anisotropy of elastic sealing elements and intensive wear of friction surfaces.
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Deulin, E.A., Mikhailov, V.P., Panfilov, Y.V., Nevshupa, R.A. (2010). Precision of Vacuum Mechanisms. In: Mechanics and Physics of Precise Vacuum Mechanisms. Fluid Mechanics and Its Applications, vol 91. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-2520-3_5
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