Abstract
As was previously shown, modern vacuum technology uses a large number of different vacuum mechanisms, and most of them are vacuum feedthroughs and drives.
The research of feedthroughs for the purpose of enhancing their precision, for the improvement of power parameters, longevity and reliability, as well as for the reduction of the outgassing rate is performed by designers simultaneously with the design of a new vacuum equipment, especially in the case, when the parameters of the existing feedthroughs do not satisfy the requirements.
The design of new mechanisms in the case of the existence of multi variables decision in combination with multi parameters limitation may be done using a matrix method for the generation of new mechanisms structure. In this method the designed object is considered as a part of a complex system with certain requirements to the object, and these requirements are compared with the ordered set of the possible solution of the required design. In the case of multi-parameter optimization, as well as in the case of vacuum mechanisms, the ordered set of the possible mechanism designs should be presented in the form of a multi-dimensional matrix. From one side, for this method of generation it is necessary to have a formal description of the designed mechanism parameters and, from another side, it is necessary to have the ordered array of different solution variables. The comparison of the required parameters with the ordered set of the solution variables makes it possible to formalize the process of selecting the variable.
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References
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Deulin, E.A., Mikhailov, V.P., Panfilov, Y.V., Nevshupa, R.A. (2010). Matrix Method of the Design of New Mechanisms Structure. In: Mechanics and Physics of Precise Vacuum Mechanisms. Fluid Mechanics and Its Applications, vol 91. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-2520-3_4
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DOI: https://doi.org/10.1007/978-90-481-2520-3_4
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