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Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics (SSAOPP, volume 10)
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Table of contents (8 chapters)
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Bibliographic Information
Book Title: Film Deposition by Plasma Techniques
Authors: Mitsuharu Konuma
Series Title: Springer Series on Atomic, Optical, and Plasma Physics
DOI: https://doi.org/10.1007/978-3-642-84511-6
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1992
Softcover ISBN: 978-3-642-84513-0Published: 15 December 2011
eBook ISBN: 978-3-642-84511-6Published: 06 December 2012
Series ISSN: 1615-5653
Series E-ISSN: 2197-6791
Edition Number: 1
Number of Pages: X, 224
Topics: Atomic, Molecular, Optical and Plasma Physics, Condensed Matter Physics, Engineering, general