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Generation of Cold Plasma

  • Mitsuharu Konuma
Part of the Springer Series on Atoms+Plasmas book series (SSAOPP, volume 10)

Abstract

Cold plasmas are generated by certain types of gas discharges at low pressure. As each discharge has its own characteristics, the type of discharge has to be chosen appropriately for the purpose of its application.

Keywords

Glow Discharge Discharge Tube Positive Column Microwave Discharge Plasma Potential 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • Mitsuharu Konuma
    • 1
  1. 1.Max-Planck-Institut für FestkörperforschungStuttgart 80Fed. Rep. of Germany

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