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Generation of Cold Plasma

  • Chapter
Film Deposition by Plasma Techniques

Part of the book series: Springer Series on Atoms+Plasmas ((SSAOPP,volume 10))

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Abstract

Cold plasmas are generated by certain types of gas discharges at low pressure. As each discharge has its own characteristics, the type of discharge has to be chosen appropriately for the purpose of its application.

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Authors and Affiliations

  1. Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, W-7000, Stuttgart 80, Fed. Rep. of Germany

    Dr. Mitsuharu Konuma

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  1. Dr. Mitsuharu Konuma
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© 1992 Springer-Verlag Berlin Heidelberg

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Konuma, M. (1992). Generation of Cold Plasma. In: Film Deposition by Plasma Techniques. Springer Series on Atoms+Plasmas, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84511-6_3

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  • DOI: https://doi.org/10.1007/978-3-642-84511-6_3

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-84513-0

  • Online ISBN: 978-3-642-84511-6

  • eBook Packages: Springer Book Archive

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