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Surface Modification by Cold Plasma

  • Chapter
Film Deposition by Plasma Techniques

Part of the book series: Springer Series on Atoms+Plasmas ((SSAOPP,volume 10))

Abstract

Carbides and nitrides of transition metals have unique properties. They are chemically and thermally stable, are often good electrical and thermal conductors, and are hard. However, they are brittle and difficult to machine. Therefore, in order to give metals heat resistance, anticorrosion properties or wear resistance, a finishing procedure is undertaken to modify the metal surface after machining. If a cold plasma is applied in this process, metal surfaces can be nitrided or carburized at temperatures lower than that of conventional thermochemical treatments. In addition, higher reaction rates can be attained. This plasma process has been applied widely to surface hardening, making protective or tribological coatings. Also, in semiconductor technology, plasma surface treatments, such as nitriding and oxidation, have become important techniques for the formation of electrically insulating films on semiconductor surfaces (e.g., Si, GaAs).

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  1. Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, W-7000, Stuttgart 80, Fed. Rep. of Germany

    Dr. Mitsuharu Konuma

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© 1992 Springer-Verlag Berlin Heidelberg

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Konuma, M. (1992). Surface Modification by Cold Plasma. In: Film Deposition by Plasma Techniques. Springer Series on Atoms+Plasmas, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-84511-6_8

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  • DOI: https://doi.org/10.1007/978-3-642-84511-6_8

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