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Biochemical Sensors Based on Piezoresistive Microcantilevers

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

Abstract

Microcantilevers, which are highly attractive for their small size, high sensitivity, and low cost, have been successfully used in label-free biological and chemical sensing applications during the past 20 years. In this chapter, a piezoresistive microcantilever-based biochemical sensor is introduced, in which a mechanical bending induced by a biochemical reaction or absorption on the surface of the microcantilever is changed into an electrical signal by integrated piezoresistors. Theory and design method are introduced firstly, and then fabrication technique and characteristics of the microcantilever sensors are described in details. Finally, we introduce some biochemical detection results measured with the piezoresistive microcantilever-based sensors.

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, 5 Yiheyuan Rd, Haidian District, Beijing, 100871, China

    Xiaomei Yu

  2. Science and Technology on Electronic Test & Measurement Laboratory, School of Instrument and Electronics, North University of China, Taiyuan, Shanxi, 030051, China

    Rui Zhao

Authors
  1. Xiaomei Yu
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  2. Rui Zhao
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Corresponding author

Correspondence to Xiaomei Yu .

Editor information

Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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Yu, X., Zhao, R. (2018). Biochemical Sensors Based on Piezoresistive Microcantilevers. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_26-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_26-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-2798-7

  • Online ISBN: 978-981-10-2798-7

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