Table of contents

  1. Qiancheng Zhao, Chunhua He, Jian Cui, Guizhen Yan
  2. Shanhong Xia, Jianhua Tong, Chao Bian, Jizhou Sun, Yang Li
  3. Dong F. Wang, Huan Liu, Xuesong Shang, Weikang Xian, Yipeng Hou, Xu Yang et al.
  4. Junbo Wang, Deyong Chen, Bo Xie, Jian Chen, Lin Zhu, Yulan Lu
  5. Zhuangde Jiang, Yulong Zhao, Libo Zhao, Tingzhong Xu
  6. Zhenxiang Yi, Ming Qin, Qing-An Huang
  7. Tie Li, Lei Xu, Yuelin Wang
  8. Jianqiu Huang, Qing-An Huang
  9. Dong F. Wang, Xu Du, Xiaodong Li, Di Zhou, Cao Xia, Guowen Zheng et al.
  10. Honglong Chang, Yongcun Hao
  11. Jinling Yang, Jinying Zhang

About this book


This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field.

The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.


Micro fluid RF MEMS actuators bio MEMS sensors

Editors and affiliations

  • Qing-An┬áHuang
    • 1
  1. 1.Southeast UniversityNanjingChina

Bibliographic information

  • DOI
  • Copyright Information Springer Nature Singapore Pte Ltd. 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Online ISBN 978-981-10-2798-7
  • Series Print ISSN 2522-5065
  • Series Online ISSN 2522-5073
Industry Sectors
Materials & Steel
Chemical Manufacturing
Energy, Utilities & Environment
Oil, Gas & Geosciences