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Table of contents

  1. Zhuoqing Yang, Guifu Ding, Yan Wang, Xiaolin Zhao
  2. Junbo Wang, Deyong Chen, Bo Xie, Jian Chen, Lin Zhu, Yulan Lu
  3. Zhenxiang Yi, Ming Qin, Qing-An Huang
  4. Qiancheng Zhao, Chunhua He, Jian Cui, Guizhen Yan
  5. Zhiqiang Zhang, Xiaoping Liao
  6. Honglong Chang, Yongcun Hao
  7. Honglong Chang, Jianbing Xie, Ying Liu
  8. Weihua Pei, Hongda Chen
  9. Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Ming-Hao Wang
  10. Zhuangde Jiang, Yulong Zhao, Libo Zhao, Tingzhong Xu
  11. Jinling Yang, Jinying Zhang
  12. Yufeng Zhang, Weijian Yuan, Rui Xue, Xiaowei Liu
  13. Licheng Deng, Zhiyu Wen, Xingqiang Zhao
  14. Tie Li, Lei Xu, Yuelin Wang
  15. Renxin Wang, Huaiqiang Yu, Zhihong Li
  16. Jianqiu Huang, Qing-An Huang
  17. Shanhong Xia, Jianhua Tong, Chao Bian, Jizhou Sun, Yang Li
  18. Libo Zhao, Zhuangde Jiang, Zhikang Li, Yihe Zhao
  19. Dong F. Wang, Huan Liu, Xuesong Shang, Weikang Xian, Yipeng Hou, Xu Yang et al.
  20. Dong F. Wang, Xu Du, Xiaodong Li, Di Zhou, Cao Xia, Guowen Zheng et al.
  21. Li-Feng Wang, Qing-An Huang, Lei Han
  22. Guohua Liu, Wei Zhang
  23. Chi Zhang, Zhong Lin Wang

About this book

Introduction

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field.

The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.

Keywords

Micro fluid RF MEMS actuators bio MEMS sensors

Editors and affiliations

  • Qing-An┬áHuang
    • 1
  1. 1.Southeast UniversityNanjingChina

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-10-2798-7
  • Copyright Information Springer Nature Singapore Pte Ltd. 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Online ISBN 978-981-10-2798-7
  • Series Print ISSN 2522-5065
  • Series Online ISSN 2522-5073
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