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Micromachined Gas Inertial Sensors

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Micro Electro Mechanical Systems

Part of the book series: Micro/Nano Technologies ((MNT,volume 2))

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Abstract

Development of micromachined inertial sensors has been widely addressed for many years. Most micromachined inertial sensors generally use a mechanical structure including a solid proof mass suspended on springs, which raises the complexity of structure and fabrication and particularly restricts the high shock resistance of the sensor. In this chapter, we introduce a kind of micromachined thermal gas inertial sensor by using thermally driven gaseous flow instead of solid proof mass. The sensor generally consists of one or several heaters and multiple thermistors, which detects the deflections of temperature profile induced by inertial quantities. The thermal inertial sensors, including thermal convective accelerometer and thermal gas gyroscope, have exhibited unique advantages of simple structure, low cost, and high shock resistance.

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Authors and Affiliations

  1. State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instrument, Tsinghua University, Beijing, 100084, China

    Rong Zhu

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  1. Rong Zhu
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Correspondence to Rong Zhu .

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Editors and Affiliations

  1. Southeast University, Nanjing, China

    Qing-An Huang

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Zhu, R. (2017). Micromachined Gas Inertial Sensors. In: Huang, QA. (eds) Micro Electro Mechanical Systems. Micro/Nano Technologies, vol 2. Springer, Singapore. https://doi.org/10.1007/978-981-10-2798-7_11-1

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  • DOI: https://doi.org/10.1007/978-981-10-2798-7_11-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-2798-7

  • Online ISBN: 978-981-10-2798-7

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