Overview
- Editors:
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Jiwang Yan
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Department of Mechanical Engineering, Keio University, Yokohama, Japan
- Summarizes the latest micro-/nanofabrication technology and manufacturing research
- Provides comprehensive and multidisciplinary knowledge and methodologies
- Intended for not only specialists in this field but also a broad range of students and researchers from other related disciplines
- Written by authors from Japan, China, Germany, Great Britain, Singapore and Malaysia, whose research in this area is both remarkable and groundbreaking
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Table of contents (30 entries)
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- Lingbao Kong, Zhongchen Cao, Laiting Ho
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- Takayuki Shibata, Junji Sasano, Moeto Nagai
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- Hongjin Jung, Takehiro Hayasaka, Eiji Shamoto
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- Masahiko Yoshino, Motoki Terano
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- Yuko Aono, Atsushi Hirata
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- Lars Schönemann, Ekkard Brinksmeier
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- Yasuhiro Kakinuma, Yuta Mizumoto
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- Masayoshi Mizutani, Shaolin Xu, Keita Shimada, Tsunemoto Kuriyagawa
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- Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
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- Rui Huang, XinQuan Zhang, Kui Liu
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- Hiroaki Onoe, Koki Yoshida
About this book
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Editors and Affiliations
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Department of Mechanical Engineering, Keio University, Yokohama, Japan
Jiwang Yan
About the editor
Prof. Jiwang Yan is currently a professor of Mechanical Engineering at Keio University, Japan, leading the Laboratory for Precision Machining and Nano Processing (PMNP). His research areas include ultraprecision machining, micro/nanomanufacturing, material processing, and nanomechanics. He has led the implementation of tens of research projects supported by governments and industry to develop key fabrication processes for optics, molds, cutting/grinding tools, semiconductor substrates, batteries, and biomechanical components. He has received a few tens of awards from academic societies and scientific foundations for his contributions in research. He is now a member of the Japan Society of Mechanical Engineers (JSME), Japan Society for Precision Engineering (JSPE), Japan Society for Abrasive Technology (JSAT), Japan Society for Applied Physics (JSAP), American Society for Precision Engineering (ASPE), European Society for Precision Engineering and Nanotechnology (euspen), and the International Academy for Production Engineering (CIRP). He also serves on the editorial boards for several academic journals, such as the International Journal of Machine Tools and Manufacture (IJMTM).
