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Atomic resolution with a megavolt electron microscope

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Advances in Solid State Physics 35

Part of the book series: Advances in Solid State Physics ((ASSP,volume 35))

Abstract

A major aim in the development of new instruments and novel techniques in rransmission electron microscopy is the improvement of the spatial resolution for structural studies on an atomic scale. Reducing the wavelength of the electrons by increasing the accelerating voltage is the route towards higher resolution followe since a long time. Compared to other techniques available at present, it offers the advantage of a more direct interpretation of the micrographs. By employing accelerating voltages of 1.25 MV or 1.3 MV, the new generation of high-voltage atomic resolution microscopes approaches now a point resolution of 0.1 nm, provided the electrical and mechanical stability of the instruments is high enough, to realise the theoretical performance. The JEM-ARM1250 high-voltage atomic resolution microscope in Stuttgart is the only instrument of this generation installed outside of Japan. In extended resolution tests it has been shown to reach its theoretical point resolution of 0.105 nm at an accelerating voltage of 1.25 MV. Owing to the proper installation conditions and a specially developed high-voltage stabilising system, an information transfer limit of 0.085 nm has been realised. Examples for the application of this instrument to structural studies in various materials demonstrate the performance of the instrument and the benefits of its atomic resolving power.

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References

  1. Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 2A & 2B, B. Jouffrey, C. Colliex, eds., (Les Editions de Physique, Les Ulis, 1994).

    Google Scholar 

  2. M. Luysberg, D. Gerthsen, Phys. stat. sol. (a) 146 (1994) 157.

    Article  ADS  Google Scholar 

  3. K. Urban, J.L. Jia, B. Kabius, in: Electron Microscopy 1992, Proc. 10th Europ. Congr. on Electron Microscopy, Granada, Vol. 2, A. López-Galindo, M.I. Rodríguez-García, eds. (Secretariado de Publicaciones de la Universidad de Granada, Granada, 1992), p. 683

    Google Scholar 

  4. M. Rühle, G. Necker, W. Mader, Ceramic Transactions 5 (1989) 340.

    Google Scholar 

  5. K.L. Merkle, Ultramicroscopy 37 (1992) 130.

    Article  Google Scholar 

  6. M.A. O'Keefe, Ultramicroscopy 47 (1992) 282.

    Article  Google Scholar 

  7. J.C.H. Spence, Experimental High Resolution Electron Microscopy (Oxford University Press, New York, Oxford, 1988).

    Google Scholar 

  8. High-Resolution Electron Microscopy and Associated Techniques, P. Buseck, J. Cowley, L. Eyring, eds. (Oxford University Press, New York, Oxford, 1988).

    Google Scholar 

  9. K.J. Hanszen in: Advances in Optical and Electron Microscopy, Vol. 4, R. Barrer and V.E. Cosslett, eds. (Academic Press, London, New York, 1972), p. 1.

    Google Scholar 

  10. J.M. Cowley, Diffraction Physics (North-Holland/Elsevier, New York, 1975).

    Google Scholar 

  11. O. Scherzer, J. Appl. Phys. 20 (1949) 20.

    Article  MATH  ADS  Google Scholar 

  12. G.F. Rempfer, Ultramicroscopy 47 (1992) 241.

    Article  Google Scholar 

  13. L.A. Bursill, Chem. Scripta 14 (1978–79) 181.

    Google Scholar 

  14. R.H. Wade, J. Frank, Optik 49 (1977) 81.

    Google Scholar 

  15. D.E. Luzzi, J. Electron Microscopy Technique 15 (1990) 406.

    Article  Google Scholar 

  16. J.L. Hutchison, Ultramicroscopy 9 (1982) 191.

    Article  Google Scholar 

  17. D. van Dyck, M. Op de Beeck, in: Electron Microscopy 1990, Proc. 12th Int. Congr. on Electron Microscopy, Seattle, Vol. 1, L.D. Peachey, D.B. Williams, eds. (San Francisco Press, San Francisco, CA 1990), p. 26.

    Google Scholar 

  18. W. Coene, G. Janssen, M. Op de Beeck, D. van Dyck, Phys. Rev. Lett. 69 (1992) 3743.

    Article  ADS  Google Scholar 

  19. W.O. Saxton, Ultramicroscopy 55 (1994) 171.

    Article  Google Scholar 

  20. R. Bierwolf, M. Hohenstein, Ultramicroscopy 56 (1994) 32.

    Article  Google Scholar 

  21. A.I. Kirkland, W.O. Saxton, K.-L Chau, K. Tsuno M. Kawasaki, Ultramicroscopy (1995) 355.

    Google Scholar 

  22. H. Lichte, Ultramicroscopy 47 (1992) 223.

    Article  Google Scholar 

  23. G. Möllenstedt, H. Düker, Z. Physik. 145 (1956) 377.

    Article  ADS  Google Scholar 

  24. A. Thust, M. Lentzen, K. Urban, Ultramicroscopy 53 (1994) 101.

    Article  Google Scholar 

  25. H. Lichte, P. Kessler, F. Lenz, W.-D. Rau, Ultramicroscopy 52 (1993) 575.

    Article  Google Scholar 

  26. P.M. Mul, W.M.J. Coene, M.T. Otten, in: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994), p. 159.

    Google Scholar 

  27. A. Orchowski, W.-D. Rau, H. Lichte, in Electron Microscopy 1994, Proc., 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994), p. 297.

    Google Scholar 

  28. W.M.J. Coene, A. Thust, M. Op de Beeck, D. van Dyck, in: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994)p. 461.

    Google Scholar 

  29. H. Rose, Optik 85 (1990) 19.

    Google Scholar 

  30. H. Rose, Ultramicroscopy 56 (1994) 11.

    Article  Google Scholar 

  31. M. Haider, G. Braunshausen, E. Schwan, in: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994) p. 195.

    Google Scholar 

  32. V.E. Cosslett, Contemp. Phys. 22 (1981) 3.

    Article  ADS  Google Scholar 

  33. K. Yagi, K. Takayanagi, K. Kobayashi, S. Nagakura, in: Proc. 7th Int. Conf. on High-Voltage Electron Microscopy, Berkeley, 1983, R.M. Fisher, R. Gronsky, K.H. Westmacott, eds. (US Department of Energy under Contract DE-AC03-76FS00098), p. 1.

    Google Scholar 

  34. C.J.D. Hetherington, E.C. Nelson, K.H. Westmacott, R. Gronsky, G. Thomas, in: Mater. Res. Soc. Symp. Proc 139 (1989), p. 277.

    Google Scholar 

  35. Y. Matsui, S. Horiuchi, Y. Bando, Y. Kitami, M. Yokoyama, S. Suehara, I. Matsui, T. Katsuda, Ultramicroscopy 39 (1991) 8.

    Article  Google Scholar 

  36. Y. Ishida, H. Ichinose, in: Electron Microscopy 1994, Proc. 13th. Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994), p. 161.

    Google Scholar 

  37. F. Phillipp, R. Höschen, M. Osaki, G. Möbus, M. Rühle, Ultramicroscopy 56 (1994) 1.

    Article  Google Scholar 

  38. A. Seeger, F. Phillipp, Ultramicroscopy 39 (1991) 32.

    Article  Google Scholar 

  39. J.S. Lally, C.J. Humphreys, A.J.F. Metherell, R.M. Fisher, Phil. Mag. 25 (1972) 321.

    Article  ADS  Google Scholar 

  40. P.E. Mooney, D.N. Bui, O.L. Krivanek, in: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994) p. 213.

    Google Scholar 

  41. O.L. Krivanek, A.J. Gubbens, N. Delby, C.E. Meyer, Microsc. Microanal. Microstruct. 3 (1992) 187.

    Article  Google Scholar 

  42. A.J. Gubbens, O.L. Krivanek, in: Electron Microscopy 1994, Proc. 13th Int. Congr. on Electron Microscopy, Paris, Vol. 1, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994) p. 165.

    Google Scholar 

  43. G. Möbus, F. Phillipp, M. Rühle, in: Proc. 52nd Annual EMSA Meeting, New Orleans, 1994, G.W. Bailey, A.J. Garratt-Reed, eds. (San Francisco Press, San Francisco, 1994) p. 748.

    Google Scholar 

  44. G. Möbus, M. Hohenstein, F. Phillipp, F. Ernst, G. Necker, M. Rühle, in: Electron Microscopy 1992, Proc. 10th Europ. Congr. on Electron Microscopy, Granada, Vol. 1, A. Ríos, J.M. Arias, L. Megías-Megías, A. López-Galindo, eds. (Secretariado de Publicationes de la Universidad de Granada, Granada 1992) p. 351.

    Google Scholar 

  45. G. Möbus, M. Rühle, Optik 93 (1993) 108.

    Google Scholar 

  46. A. Bourret, J.L. Rouvière, J. Spendeler, phys. stat. sol. (a) 107 (1988) 481.

    Article  ADS  Google Scholar 

  47. D.B. Holt, J. Mater. Sci. 19 (1984) 439.

    Article  ADS  Google Scholar 

  48. D. Schaible, Diploma thesis, Universität Stuttgart, 1994.

    Google Scholar 

  49. S. Iijima, J. Cryst. Growth 50 (1980) 675.

    Article  ADS  Google Scholar 

  50. D. Ugarte, Nature 359 (1992) 707.

    Article  ADS  Google Scholar 

  51. K.G. McKay, H.W. Kroto, D.J. Wales, J. Chem. Soc. Faraday Trans. 88 (1992) 2815.

    Article  Google Scholar 

  52. M. Yoshida, E. Osawa, Fullerene Science and Technology 1 (1993) 55.

    Google Scholar 

  53. M. Zwanger, F. Banhart, Phil. Mag. B72 (1995) 149 press.

    Article  Google Scholar 

  54. U. Wolf, F. Ernst, T. Muschik, M.W. Finnis, H.F. Fischmeister, Phil. Mag. A 66 (1992) 991.

    Article  ADS  Google Scholar 

  55. D. Hofmann, F. Ernst, Ultramicroscopy 53 (1994) 205.

    Article  Google Scholar 

  56. D. Hofmann, F. Ernst, Interface Science 2 (1994) 201.

    Google Scholar 

  57. F. Ernst, P. Pirouz, A. Heuer, Phil. Mag. A 63 (1991) 259

    Article  ADS  Google Scholar 

  58. G. Dehm, M. Rühle, G. Ding, R. Raj, in: Electron Microscopy 1994, Proceedings of 13th Int. Congr. on Electron Microscopy, Paris, Vol. 2A, B. Jouffrey, C. Colliex, eds. (Les Editions de Physique, Les Ulis, 1994) p. 277

    Google Scholar 

  59. G. Dehm, M. Rühle, G. Ding, R. Raj, Phil. Mag. B 71 (1995) 1111. *** DIRECT SUPPORT *** A00AX035 00011

    Article  Google Scholar 

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  1. Institut für Physik, Max-Planck-Institut für Metallforschung, Heisenbergstr. 1, D-70569, Stuttgart, Germany

    F. Phillipp

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  1. F. Phillipp
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Reinhard Helbig

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© 1996 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH

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Phillipp, F. (1996). Atomic resolution with a megavolt electron microscope. In: Helbig, R. (eds) Advances in Solid State Physics 35. Advances in Solid State Physics, vol 35. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0107550

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  • DOI: https://doi.org/10.1007/BFb0107550

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-528-08043-3

  • Online ISBN: 978-3-540-75334-6

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