Abstract
In the preceding chapters, the history, unit processes and scope of VLSI technology have been described. Chapter 5 was devoted to a case study in order to bring out the details of the process technology. This chapter will focus on how chemical engineering can be applied to VLSI technology.
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© 1993 Springer Science+Business Media Dordrecht
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The Society of Chemical Engineers of Japan. (1993). Process engineering aspects of VLSI production. In: Introduction to VLSI Process Engineering. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1562-9_8
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DOI: https://doi.org/10.1007/978-94-011-1562-9_8
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4682-4
Online ISBN: 978-94-011-1562-9
eBook Packages: Springer Book Archive