Introduction to VLSI Process Engineering

  • Editors
  • The Society of Chemical Engineers of Japan

Table of contents

  1. Front Matter
    Pages i-xiii
  2. The Society of Chemical Engineers of Japan
    Pages 1-6
  3. The Society of Chemical Engineers of Japan
    Pages 7-21
  4. The Society of Chemical Engineers of Japan
    Pages 22-49
  5. The Society of Chemical Engineers of Japan
    Pages 50-70
  6. The Society of Chemical Engineers of Japan
    Pages 71-120
  7. The Society of Chemical Engineers of Japan
    Pages 121-146
  8. The Society of Chemical Engineers of Japan
    Pages 147-165
  9. The Society of Chemical Engineers of Japan
    Pages 166-192
  10. Back Matter
    Pages 193-210

About this book

Introduction

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Keywords

manufacturing process engineering semiconductor semiconductor technology silicon

Bibliographic information

  • DOI https://doi.org/10.1007/978-94-011-1562-9
  • Copyright Information Chapman & Hall 1993
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-94-010-4682-4
  • Online ISBN 978-94-011-1562-9
  • About this book
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