Technological Realization of MEMS Structures and Their Experimental Investigation

Abstract

The last chapter presents the developed surface-micromachining technology that was patented by the authors and is suitable for fabrication of various MEMS actuators and sensors. Peculiarities of the microtechnology are highlighted such as utilization of special fractal microstructures, which enhance bonding strength of the microdevice to a substrate resulting in increased reliability. The chapter also describes design issues of electrostatic microswitches that were fabricated using the developed process and may be successfully implemented into various “system-on-chip” applications. Results of electrical and dynamic testing of the fabricated microswitches are provided including measurements of actuation voltages and natural frequencies with mode shapes. Microscope-based probe station and laser Doppler vibrometry system used for experiments are described as well. This chapter also provides overview of the developed micromotor fabrication technology that is based on application of standard UV lithography and plating. Produced prototypes of the electrostatic micromotors are demonstrated including their specifications. Lastly, a device developed for the micromotor electric control is presented that is able to adjust voltage, frequency, number of phases and other parameters.