Microsystems Dynamics

  • Vytautas Ostasevicius
  • Rolanas Dauksevicius

Table of contents

  1. Front Matter
    Pages i-viii
  2. Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 1-10
  3. Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 11-52
  4. Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 53-132
  5. Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 133-183
  6. Vytautas Ostasevicius, Rolanas Dauksevicius
    Pages 185-214

About this book

Introduction

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Keywords

MEMS control dynamical systems manufacturing micromotors microswitches microsystems nonlinear dynamics vibration

Authors and affiliations

  • Vytautas Ostasevicius
    • 1
  • Rolanas Dauksevicius
    • 2
  1. 1.Institute for Hi-Tech DevelopmentKaunas University of TechnologyKaunasLithuania
  2. 2., Institute for Hi-Tech DevelopmentKaunas University of TechnologyKaunasLithuania

Bibliographic information

  • DOI https://doi.org/10.1007/978-90-481-9701-9
  • Copyright Information Springer Science+Business Media B.V. 2011
  • Publisher Name Springer, Dordrecht
  • eBook Packages Engineering
  • Print ISBN 978-90-481-9700-2
  • Online ISBN 978-90-481-9701-9
  • Series Print ISSN 2213-8986
  • About this book
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