Abstract
An overview of early MEMS research and developments made in Russia (U.S.S.R.) from 1971 to 1985, which are not widely published and described in the western technical literature, is presented in this paper. Moscow Physics Engineering Institute was the first Russian organization, where MEMS research was initiated. The number of world pioneering developments was made there. Many other institutions in the former Soviet Union participated in early MEMS works. Among them were “Giredmet”, “NiiTeplopribor”, “Electronpribor”, “Nii Physical Measurements”, Bauman Technical University, Novisibirsk University, MIET, Kaunas Polytechnical Institute, Lvov Polytechnical Institute, Leningrad State University and other organizations.
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Vaganov, V. (2010). History of Early Research on MEMS in Russia (U.S.S.R.). In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_1
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