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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

  • Conference proceedings
  • © 2010

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Editors:
  1. Evgeni Gusev

    1. Qualcomm MEMS Technologies, Inc., San Jose, USA

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    You can also search for this editor in PubMed   Google Scholar

  2. Eric Garfunkel

    1. Inst. Advanced Materials Devices &, Nanotechnology, Rutgers University, Piscataway, USA

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    You can also search for this editor in PubMed   Google Scholar

  3. Arthur Dideikin

    1. A.E Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg, Russian Federation

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    You can also search for this editor in PubMed   Google Scholar

  • State-of-the-art reviews from leading experts in the field of MEMS/NEMS devices and technologies
  • The subject is covered from different angles, including technology, device designs, processing aspects, materials properties, characterization, microstructural studies
  • Broad coverage from technology fundamentals all the way to device applications
  • Includes supplementary material: sn.pub/extras

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Table of contents (24 papers)

  1. Front Matter

    Pages i-x
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  2. MEMS/NEMS Technologies and Applications

    1. Front Matter

      Pages 1-1
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    2. History of Early Research on MEMS in Russia (U.S.S.R.)

      • Vladimir Vaganov
      Pages 3-15

    3. Challenges of Complete CMOS/MEMS Systems Integration

      • Vladimir Vaganov
      Pages 17-30

    4. MEMS for Practical Applications

      • Masayoshi Esashi
      Pages 31-40

    5. Nanochip: A MEMS-Based Ultra-High Data Density Memory Device

      • Nickolai Belov, Donald Adams, Peter Ascanio, Tsung-Kuan Chou, John Heck, Byong Kim et al.
      Pages 41-65

    6. Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU

      • Benedetto Vigna, Fabio Pasolini, Roberto de Nuccio, Macro Capovilla, Luciano Prandi, Fabio Biganzoli
      Pages 67-74

    7. Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors

      • Alexandru Müller, Dan Neculoiu, George Konstantinidis, Tauno Vähä-Heikilä
      Pages 75-87

    8. Monocrystalline-Silicon Microwave MEMS Devices

      • Joachim Oberhammer, Mikael Sterner, Nutapong Somjit
      Pages 89-100

    9. Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites

      • Valery G. Golubev
      Pages 101-113

  3. MEMS Device and Reliability Physics

    1. Front Matter

      Pages 116-116
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    2. Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams

      • Slava Krylov, Nir Dick
      Pages 117-128

    3. Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS

      • Peter G. Steeneken, Jiri Stulemeijer
      Pages 129-140

    4. The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches

      • George Papaioannou
      Pages 141-153

  4. Advanced Processes and Materials

    1. Front Matter

      Pages 156-156
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    2. Development of DRIE for the Next Generation of MEMS Devices

      • H. Ashraf, J. Hopkins, L. M. Lea
      Pages 157-165

    3. Low-Temperature Processes for MEMS Device Fabrication

      • Jyrki Kiihamäki, Hannu Kattelus, Martti Blomberg, Riikka Puurunen, Mari Laamanen, Panu Pekko et al.
      Pages 167-178

    4. High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications

      • Nils Hoivik, He Liu, Kaiying Wang, Guttorm Salomonsen, Knut Aasmundtveit
      Pages 179-190

    5. 3D Integration of MEMS and IC: Design, Technology and Simulations

      • Maaike M. V. Taklo, Kari SchjøLberg-Henriksen, Nicolas Lietaer, Josef Prainsack, Anders Elfving, Josef Weber et al.
      Pages 191-203

    6. Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices

      • Guanxiong Liu, Qinghui Shao, Alexander A. Balandin, William Stillman, Michal Shur, Sergey Rumyantsev
      Pages 205-214
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Keywords

About this book

A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.

Editors and Affiliations

  • Qualcomm MEMS Technologies, Inc., San Jose, USA

    Evgeni Gusev

  • Inst. Advanced Materials Devices &, Nanotechnology, Rutgers University, Piscataway, USA

    Eric Garfunkel

  • A.E Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg, Russian Federation

    Arthur Dideikin

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