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Part of the book series: SpringerBriefs in Applied Sciences and Technology ((BRIEFSAPPLSCIENCES))

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Abstract

Field-emission (FE) emitters are indispensable for atomic resolution EMs (ARMs) and analytical EMs (AEMs). Therefore, we had to do best to produce UHV in EMs on market.

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References

  1. Harada Y, Tomita M (2011) Development of technology of electron microscope in Japan. Microscopy 46(Suppl 3):2–47 (in Japanese)

    Google Scholar 

  2. Kim HS, Kratschmer E, Yu ML, Thomson MGR, Chang THP (1994) Evaluation of Zr/O/W Schottky emitters for microcolumn applications. J Vac Sci Technol B 12(6):3413–3417

    Article  Google Scholar 

  3. Crewe AV, Eggenberger DN, Wall J, Welter LM (1968) Electron gun using a field-emission source. Rev Sci Instrum 39(4):576–583

    Article  ADS  Google Scholar 

  4. Harada Y, Yoshimura N (1987) Significance of vacuum technology in electron micro-scope. J Vac Soc Jpn 30(12):985–988 (in Japanese)

    Article  Google Scholar 

  5. Tomita T (1990) Ultrahigh-vacuum scanning electron microscope. Electron Microsc 25(2):114–117 (in Japanese)

    Google Scholar 

  6. Kondo Y, Ohi K, Ishibashi Y, Hirano H, Harada Y, Takayanagi K, Tanishiro Y, Kobayashi K, Yagi K (1991) Design and development of an ultrahigh vacuum high-resolution transmission electron microscope. Ultramicroscopy 35(2):111–118

    Article  Google Scholar 

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Yoshimura, N. (2014). Ultrahigh Vacuum Electron Microscopes. In: Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes. SpringerBriefs in Applied Sciences and Technology. Springer, Tokyo. https://doi.org/10.1007/978-4-431-54448-7_6

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