Abstract
Field-emission (FE) emitters are indispensable for atomic resolution EMs (ARMs) and analytical EMs (AEMs). Therefore, we had to do best to produce UHV in EMs on market.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Harada Y, Tomita M (2011) Development of technology of electron microscope in Japan. Microscopy 46(Suppl 3):2–47 (in Japanese)
Kim HS, Kratschmer E, Yu ML, Thomson MGR, Chang THP (1994) Evaluation of Zr/O/W Schottky emitters for microcolumn applications. J Vac Sci Technol B 12(6):3413–3417
Crewe AV, Eggenberger DN, Wall J, Welter LM (1968) Electron gun using a field-emission source. Rev Sci Instrum 39(4):576–583
Harada Y, Yoshimura N (1987) Significance of vacuum technology in electron micro-scope. J Vac Soc Jpn 30(12):985–988 (in Japanese)
Tomita T (1990) Ultrahigh-vacuum scanning electron microscope. Electron Microsc 25(2):114–117 (in Japanese)
Kondo Y, Ohi K, Ishibashi Y, Hirano H, Harada Y, Takayanagi K, Tanishiro Y, Kobayashi K, Yagi K (1991) Design and development of an ultrahigh vacuum high-resolution transmission electron microscope. Ultramicroscopy 35(2):111–118
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2014 The Author(s)
About this chapter
Cite this chapter
Yoshimura, N. (2014). Ultrahigh Vacuum Electron Microscopes. In: Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes. SpringerBriefs in Applied Sciences and Technology. Springer, Tokyo. https://doi.org/10.1007/978-4-431-54448-7_6
Download citation
DOI: https://doi.org/10.1007/978-4-431-54448-7_6
Published:
Publisher Name: Springer, Tokyo
Print ISBN: 978-4-431-54447-0
Online ISBN: 978-4-431-54448-7
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)