Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes

  • Nagamitsu Yoshimura

Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Table of contents

  1. Front Matter
    Pages i-xi
  2. Nagamitsu Yoshimura
    Pages 1-10
  3. Nagamitsu Yoshimura
    Pages 11-23
  4. Nagamitsu Yoshimura
    Pages 47-79
  5. Nagamitsu Yoshimura
    Pages 81-114
  6. Nagamitsu Yoshimura
    Pages 115-122
  7. Back Matter
    Pages 123-125

About this book

Introduction

This book describes the developmental history of the vacuum system of the transmission electron microscope (TEM) at the Japan Electron Optics Laboratory (JEOL) from its inception to its use in today’s high-technology microscopes. The author and his colleagues were engaged in developing vacuum technology for electron microscopes (JEM series) at JEOL for many years. This volume presents a summary and explanation of their work and the technology that makes possible a clean ultrahigh vacuum.

The typical users of the TEM are top-level researchers working at the frontiers of new materials or with new biological specimens. They often use the TEM under extremely severe conditions, with problems sometimes occurring in the vacuum system of the microscopes. JEOL engineers then must work as quickly as possible to improve the vacuum evacuation system so as to prevent the recurrence of such problems. Among the wealth of explanatory material in this book are examples of users’ reports of problems in the vacuum system of the JEM, such as the occurrence of a micro-discharge and the back-streaming of the diffusion pump (DP) oil vapor.

This work is a valuable resource for researchers who use the transmission electron microscope and for engineers and scientists interested in its technology.

Keywords

Contamination Build Up Electron Microscope Field Emission Electron Gun Japan Electron Optics Laboratory Sputter Ion Pump Vibration Free

Authors and affiliations

  • Nagamitsu Yoshimura
    • 1
  1. 1.JEOL Ltd.TokyoJapan

Bibliographic information

  • DOI https://doi.org/10.1007/978-4-431-54448-7
  • Copyright Information The Author(s) 2014
  • Publisher Name Springer, Tokyo
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-4-431-54447-0
  • Online ISBN 978-4-431-54448-7
  • Series Print ISSN 2191-530X
  • Series Online ISSN 2191-5318
  • About this book
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