Development of the Evacuation Systems for JEMs

  • Nagamitsu Yoshimura
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)


The evacuation systems and their pumping devices for JEMs were improved year by year, in order to achieve very clean vacuum. We examined the DP cascade system thoroughly in respect of DP oil-vapor backstreaming, and refined the DP-stack and the system year by year according to experimental results. And finally, we established the refined cascade DP system for JEMs.


Safety System Clean Vacuum Evacuation System Bypass Valve Specimen Chamber 


  1. 1.
    Holland L (1971) Vacua: how they may be improved or impaired by vacuum pumps and traps. Vacuum 21(1/2):45–53CrossRefGoogle Scholar
  2. 2.
    Yoshimura N, Hirano H, Norioka S, Etoh T (1984) A cascade diffusion pump system for an electron microscope. J Vac Sci Technol A 2(1):61–67ADSCrossRefGoogle Scholar
  3. 3.
    Hengevoss J, Huber WK (1963) The influence of fore-vacuum conditions on ultrahigh-vacuum pumping systems with oil diffusion pumps. Vacuum 13(1):1–9CrossRefGoogle Scholar
  4. 4.
    Kojima, Nagahama Y, Yoshimura N, Oikawa H (1973) Improved vacuum system for the electron microscope. J Vac Soc Jpn 16(6):217–224 (in Japanese)CrossRefGoogle Scholar
  5. 5.
    Mikami O, Oikawa H, Yoshimura N, JEOL Co Ltd (1969) Patent no 1969–31,075, 22 Dec 1969Google Scholar
  6. 6.
    Yoshimura N, Ohmori S, Nagahama Y, Oikawa H (1974) A new vacuum system for an electron microscope. In: Proceedings of the 6th international vacuum congress. J J Appl Phys Suppl 2 Pt 1: 249–252Google Scholar
  7. 7.
    Laurenson L (1982) Technology and applications of pumping fluids. J Vac Sci Technol 20(4):989–995ADSCrossRefGoogle Scholar
  8. 8.
    Nakayama K (1965) Vapor pressure of vacuum pump oils. J Vac Soc Jpn 8(10):333–337 (in Japanese)CrossRefGoogle Scholar
  9. 9.
    Hablanian MH, Maliakal JC (1973) Advances in diffusion pump technology. J Vac Sci Technol 10(1):58–64ADSCrossRefGoogle Scholar
  10. 10.
    Hirano H, Yoshimura N (1981) Thermal loss of a cold trap. J Vac Soc Jpn 24(4):167–169 (in Japanese)CrossRefGoogle Scholar
  11. 11.
    Yoshimura N, Kobayashi N, JEOL Co Ltd (1984) Patent no 1984–17,083, 18 May 1984Google Scholar
  12. 12.
    Norioka S, Yoshimura N (1991) Practical advantages of a cascade diffusion pump system of a scanning electron microscope. J Vac Sci Technol A 9(4):2384–2388ADSCrossRefGoogle Scholar
  13. 13.
    Yoshimura N (2009) Advantages of slow high-vacuum pumping for suppressing excessive gas load in dynamic evacuation systems. J Vac Soc Jpn 52(2):92–98 (in Japanese)MathSciNetCrossRefGoogle Scholar
  14. 14.
    Hablanian MH (1992) Prevention of overload in high vacuum systems. J. Vac. Sci. Technol. A 10(4):2629–2632ADSCrossRefGoogle Scholar
  15. 15.
    Yoshimura N, Hirano H, Etoh T (1983) Mechanism of contamination build-up induced by fine electron probe irradiation. Vacuum 33(7):391–395CrossRefGoogle Scholar
  16. 16.
    Wall JS (1980) Contamination in the SEM at Ultrahigh Vacuum Scan. Electron Microsc 1:99–106.Google Scholar
  17. 17.
    Ohta S, Yoshimura N, Hirano H (1983) Resistor-network simulation method for a vacuum system in a molecular flow region. J Vac Sci Technol A 1(1):84–89ADSCrossRefGoogle Scholar
  18. 18.
    Yoshimura N (1985) A differential pressure-rise method for measuring the net outgassing rates of a solid material and for estimating its characteristic values as a gas source. J Vac Sci Technol A 3(6):2177–2183ADSCrossRefGoogle Scholar
  19. 19.
    Hirano H, Kondo Y, Yoshimura N (1988) Matrix calculation of pressures in high-vacuum systems. J Vac Sci Technol A 6(5):2865–2869ADSCrossRefGoogle Scholar
  20. 20.
    Kendall BRF (1983) Comments on: resistor-network simulation method for a vacuum system in a molecular flow region. J Vac Sci Technol A 1(84); J Vac Sci Technol A 1(4): 1881–1882Google Scholar

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© The Author(s) 2014

Authors and Affiliations

  • Nagamitsu Yoshimura
    • 1
  1. 1.Kokubunji TokyoJapan

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