Abstract
The evacuation systems and their pumping devices for JEMs were improved year by year, in order to achieve very clean vacuum. We examined the DP cascade system thoroughly in respect of DP oil-vapor backstreaming, and refined the DP-stack and the system year by year according to experimental results. And finally, we established the refined cascade DP system for JEMs.
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Yoshimura, N. (2014). Development of the Evacuation Systems for JEMs. In: Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes. SpringerBriefs in Applied Sciences and Technology. Springer, Tokyo. https://doi.org/10.1007/978-4-431-54448-7_4
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DOI: https://doi.org/10.1007/978-4-431-54448-7_4
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