The Modeling of Electromigration A New Challenge for TCAD?
It is argued that the modeling of electromigration at the microscopic level results into systems of equations which can be very well addressed by state-of-the-art TCAD methods.
KeywordsMetal Stripe Actual Field Performance Couple Partial Differential Equation Equilibrium Vacancy Effective Valence
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- J.R. Black, Proc. 6th Ann. Reliab. Phys. Symp. pp. 148, 1967.Google Scholar
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