Advertisement

Simulation of Semiconductor Processes and Devices 1998

SISPAD 98

  • Kristin De Meyer
  • Serge Biesemans
Conference proceedings

Table of contents

  1. Front Matter
    Pages I-XIV
  2. R. Goossens
    Pages 1-2
  3. Norihiko Kotani
    Pages 3-7
  4. Z. Krivokapic, W. D. Heavlin, D. S. Bang
    Pages 8-11
  5. Yu E. Egorov, Yu N. Makarov, I. N. Przhevalskij, R. A. Talalaev, G. Strauch, D. Schmitz et al.
    Pages 20-21
  6. M. Dauelsberg, L. Kadinski, C. Schmidt, C. Allenbach, M. Morstein
    Pages 22-25
  7. Tarja Riihisaari, Hannu Ronkainen, Hannu Kattelus, Hannu Hakojärvi
    Pages 30-33
  8. V. I. Kol’dyaev, S. Decoutere, R. Kuhn, L. Deferm
    Pages 34-37
  9. S. Marksteiner, H. Schäfer, T. F. Meister, A. Spitzer
    Pages 38-41
  10. C.-K. Lin, Neil Goldsman, C.-H. Chang, Isaak Mayergoyz, Sheldon Aronowitz, Jeffrey Dong et al.
    Pages 42-45
  11. G. H. Gilmer, L. Pelaz, C. Rafferty, M. Jaraiz
    Pages 46-47
  12. Reza Kasnavi, Peter B. Griffin, James D. Plummer
    Pages 48-50
  13. Xiaoning Qi, Sherry Y. Shen, Ze-Kai Hsiau, Zhiping Yu, Robert Dutton
    Pages 61-64
  14. R. Martins, R. Sabelka, W. Pyka, S. Selberherr
    Pages 69-72
  15. B. Govoreanu, J. Kopalides, W. Schoenmaker, G. Dima, O. Mitrea, M. D. Profirescu
    Pages 73-76
  16. M. Stockinger, R. Strasser, R. Plasun, A. Wild, S. Selberherr
    Pages 77-80
  17. L. Gruber, N. Khalil, D. A. Bellb, J. Faricelli
    Pages 81-84
  18. T. Grasser, R. Strasser, M. Knaipp, K. Tsuneno, H. Masuda, S. Selberherr
    Pages 93-96
  19. Dorothée Brocard, Vincent Senez, Sébastien Bozek, Jérôme Herbaux, Régis Bossut
    Pages 97-100
  20. Tao Chen, Daniel W. Yergeau, Robert W. Dutton
    Pages 101-104
  21. V. Palankovski, G. Kaiblinger-Grujin, H. Kosina, S. Selberherr
    Pages 105-108
  22. D. Vietzke, D. Reznik, M. Stoisiek, W. Gerlach
    Pages 109-112
  23. F. Gámiz, J. A. López-Villanueva, J. B. Roldán, J. E. Carceller
    Pages 113-116
  24. Y. Tosaka, H. Kanata, T. Itakura, K. Suzuki, S. Satoh
    Pages 117-120
  25. A. Abramo, C. Fiegna, P. Casarini
    Pages 121-128
  26. MeiKei Ieong, Ronald Logan, James Slinkman
    Pages 129-132
  27. C. S. Rafferty, B. Biegel, Z. Yu, M. G. Ancona, J. Bude, R. W. Dutton
    Pages 137-140
  28. Peter Voigt, Gabriele Schrag, Gerhard Wachutka
    Pages 149-152
  29. N. M. Wilson, Z. K. Hsiau, R. W. Dutton, P. M. Pinsky
    Pages 153-156
  30. H. van Meer, D. Schreurs, K. van der Zanden, W. De Raedt, E. Simoen, L. Kaufmann
    Pages 157-160
  31. Yongchan Ban, Taeyoung Won
    Pages 161-164
  32. A. Bournel, P. Dollfus, P. Bruno, P. Hesto
    Pages 173-176
  33. Nancy Hitschfeld, María-Cecilia Rivara, Mauricio Palma
    Pages 189-192
  34. M. Radi, S. Selberherr
    Pages 193-196

About these proceedings

Introduction

This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)

Keywords

algorithm integrated circuit modeling numerical methods optimization simulation single-electron transistor

Editors and affiliations

  • Kristin De Meyer
    • 1
  • Serge Biesemans
    • 1
  1. 1.IMEC vzwLeuvenBelgium

Bibliographic information

Industry Sectors
Pharma
Automotive
Biotechnology
Electronics
IT & Software
Telecommunications
Energy, Utilities & Environment
Aerospace
Engineering