Simulation of Semiconductor Processes and Devices 1998


  • Kristin De Meyer
  • Serge Biesemans
Conference proceedings

Table of contents

  1. Front Matter
    Pages I-XIV
  2. R. Goossens
    Pages 1-2
  3. Norihiko Kotani
    Pages 3-7
  4. Z. Krivokapic, W. D. Heavlin, D. S. Bang
    Pages 8-11
  5. Yu E. Egorov, Yu N. Makarov, I. N. Przhevalskij, R. A. Talalaev, G. Strauch, D. Schmitz et al.
    Pages 20-21
  6. M. Dauelsberg, L. Kadinski, C. Schmidt, C. Allenbach, M. Morstein
    Pages 22-25
  7. Tarja Riihisaari, Hannu Ronkainen, Hannu Kattelus, Hannu Hakojärvi
    Pages 30-33
  8. V. I. Kol’dyaev, S. Decoutere, R. Kuhn, L. Deferm
    Pages 34-37
  9. S. Marksteiner, H. Schäfer, T. F. Meister, A. Spitzer
    Pages 38-41
  10. C.-K. Lin, Neil Goldsman, C.-H. Chang, Isaak Mayergoyz, Sheldon Aronowitz, Jeffrey Dong et al.
    Pages 42-45
  11. G. H. Gilmer, L. Pelaz, C. Rafferty, M. Jaraiz
    Pages 46-47
  12. Reza Kasnavi, Peter B. Griffin, James D. Plummer
    Pages 48-50
  13. Xiaoning Qi, Sherry Y. Shen, Ze-Kai Hsiau, Zhiping Yu, Robert Dutton
    Pages 61-64

About these proceedings


This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)


algorithm integrated circuit modeling numerical methods optimization simulation single-electron transistor

Editors and affiliations

  • Kristin De Meyer
    • 1
  • Serge Biesemans
    • 1
  1. 1.IMEC vzwLeuvenBelgium

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Vienna 1998
  • Publisher Name Springer, Vienna
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-7091-7415-9
  • Online ISBN 978-3-7091-6827-1
  • About this book
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