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The Role of Quantization Effects in Inversion Hole Layers of Tunnel MOS Structures on n-Si Substrates

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Simulation of Semiconductor Processes and Devices 1998

Abstract

Disregarding the quantum effects in inversion hole layers was shown to result in the false calculation of the distribution of the applied voltage in a tunnel MOS structure which consequently provokes substantial errors in estimating the tunnel currents and the energy of injected electrons.

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© 1998 Springer-Verlag/Wien

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Shulekin, A.F., Vexler, M.I., Zimmermann, H. (1998). The Role of Quantization Effects in Inversion Hole Layers of Tunnel MOS Structures on n-Si Substrates. In: De Meyer, K., Biesemans, S. (eds) Simulation of Semiconductor Processes and Devices 1998. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6827-1_35

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  • DOI: https://doi.org/10.1007/978-3-7091-6827-1_35

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-7091-7415-9

  • Online ISBN: 978-3-7091-6827-1

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