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Atomistic simulations of extrinsic defects evolution and transient enhanced diffusion in silicon

  • F. Cristiano
  • B. Colombeau
  • C. Bonafos
  • J. Aussoleil
  • G. Ben Assayag
  • A. Claverie
Conference paper

Abstract

We present a “unified” model for the simulation of boron transient enhanced diffusion in both crystalline and preamorphised structures. The model describes the thermal evolution of a supersaturation of Si interstitial atoms in dynamical equilibrium with all types of extrinsic defects. We show some successful applications of our model to a variety of experimental conditions and give an example of its predictive capabilities at ultra low implantion energies.

Keywords

Dislocation Loop Defect Region Atomistic Simulation Acceleration Coefficient Boron Diffusivity 
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References

  1. [1]
    C. Bonafos, M. Omri, B. de Mauduit, G. Benassayag, A. Claverie, D. Alquier, A. Martinez and D. Mathiot,J. Appl. Phys. 82 (1997) 2855.CrossRefGoogle Scholar
  2. [2]
    H..S. Chao, S.W. Crowder, P.B. Griffin and J.D. Plummer, J. Appl. Phys., 79 (1996) 2352.CrossRefGoogle Scholar
  3. [3]
    A. Claverie, F. Cristiano, B. Colombeau and N. Cowern, MRS Proceedings vol 610 (2000).Google Scholar
  4. [4]
    A. Claverie, B. Colombeau, F. Cristiano, A. Altibelli and C. Bonafos, MRS Proc. 2001.Google Scholar
  5. [5]
    B. Colombeau, F. Cristiano, A. Altibelli, C. Bonafos, G. Benassayag and A. Claverie, Appl. Phys. Lett., 78 (2001) 940.CrossRefGoogle Scholar
  6. [6]
    N.Cowern et al., Phys. Rev. Lett., 82 (1999) 4460.8Google Scholar
  7. [7]
    A.H. Gencer and S.T. Dunham,J. Appl. Phys., 81 (1997) 631.CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Wien 2001

Authors and Affiliations

  • F. Cristiano
    • 1
  • B. Colombeau
    • 1
  • C. Bonafos
    • 1
  • J. Aussoleil
    • 2
  • G. Ben Assayag
    • 2
  • A. Claverie
    • 2
  1. 1.LAAS/CNRSToulouseFrance
  2. 2.CEMES/CNRS29 rue J. MarvigToulouseFrance

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