Abstract
We present an advanced algorithm for an extraction tool that computes inductances of interconnect structures. As already pointed out in [1] the pursued energy concept leads to a 6-fold integral which can also be evaluated by use of the Monte Carlo method. Classical implementation of the Monte Carlo method, where the whole geometry has to be hunted for the associated element loses efficiency. Our approach is applied without time consuming element location for the random point coordinates to compute this integral.
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References
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Harlander, C., Sabelka, R., Selberherr, S. (2001). A Comparative Study Of Two Numerical Techniques For Inductance Calculation In Interconnect Structures. In: Tsoukalas, D., Tsamis, C. (eds) Simulation of Semiconductor Processes and Devices 2001. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6244-6_56
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DOI: https://doi.org/10.1007/978-3-7091-6244-6_56
Publisher Name: Springer, Vienna
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