Abstract
We report studies of quantum transport in n+Si-Si02-p Si MetalOxide-Semiconductor (MOS) structures based upon a non-equilibrium tight-binding Green’s function method. As a result, the quasi-bound states at the Si02-p Si interface are found to be lower than those calculated by the conventional Shrödinger-Poisson analysis, since the wavefunctions in this region are coupled with the Bloch functions in the electrodes. It is also found that the leakage current through the oxide consists of not only the intraband tunneling but also the interband tunneling current.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
C-H Choi, Y.W. Wu, J-S. Goo, Z. Yu and R.W. Dutton, IEEE Trans. on Electron Devices, 2000; 47: 1843–1850.
M.G. Ancona, Z. Yu, R.W. Dutton, P.J.V. Voorde, M. Cao, and D. Vook, “Density-Gradient Analysis of MOS Tunneling, ibid: 2310–2319.
R. Lake, G. Klimeck, R.C. Bowen, and D. Jovanovic, “Single and multiband modeling of quantum electron transport through layered semiconductor devices,” 1997; 81: 7845–7869.
M. Ogawa, T. Sugano, R. Tominaga, and T. Miyoshi, “Simulation of Multi-Band Quantum Transport Reflecting Realistic Band Structure,” IEICE Trans. on Electron Devices, 2000; E83-a: 1235–1241.
H.S. Momose, M. Ono, T. Yoshitomi, T. Ohguro, S. Nakamura, M. Saito, H. Iwai, “1.5 nm direct-tunneling gate oxide Si MOSFET’s,” IEEE Trans. on Electron Devices 1996; 43: 1233–1242.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2001 Springer-Verlag Wien
About this paper
Cite this paper
Ogawa, M., Miyoshi, T. (2001). Analysis of Gate Tunneling Current in MOS Structures using Quantum Mechanical Simulation. In: Tsoukalas, D., Tsamis, C. (eds) Simulation of Semiconductor Processes and Devices 2001. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6244-6_32
Download citation
DOI: https://doi.org/10.1007/978-3-7091-6244-6_32
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7278-0
Online ISBN: 978-3-7091-6244-6
eBook Packages: Springer Book Archive