Abstract
Membranes are often employed in micro technique as a movable element, for example, in pressure sensors. Therefore, the deflection and shape change of membranes are described in detail by mathematical models of different complexity and accuracy. A table summarizes the equations for quick reference. The effects of tensile and compressive stress, membranes with corrugations and a boss in their center are included as well as the burst pressure of membranes.
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© 2015 Springer-Verlag Berlin Heidelberg
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Schomburg, W.K. (2015). Membranes. In: Introduction to Microsystem Design. RWTHedition. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47023-7_7
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DOI: https://doi.org/10.1007/978-3-662-47023-7_7
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47022-0
Online ISBN: 978-3-662-47023-7
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