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Introduction to Microsystem Design

  • Werner KarlĀ Schomburg

Part of the RWTHedition book series (RWTH)

Table of contents

  1. Front Matter
    Pages i-xxiv
  2. Werner Karl Schomburg
    Pages 1-2
  3. Werner Karl Schomburg
    Pages 3-4
  4. Werner Karl Schomburg
    Pages 5-8
  5. Werner Karl Schomburg
    Pages 9-21
  6. Werner Karl Schomburg
    Pages 23-30
  7. Werner Karl Schomburg
    Pages 31-42
  8. Werner Karl Schomburg
    Pages 43-71
  9. Werner Karl Schomburg
    Pages 73-90
  10. Werner Karl Schomburg
    Pages 91-110
  11. Werner Karl Schomburg
    Pages 111-133
  12. Werner Karl Schomburg
    Pages 135-159
  13. Werner Karl Schomburg
    Pages 161-173
  14. Werner Karl Schomburg
    Pages 175-199
  15. Werner Karl Schomburg
    Pages 201-221
  16. Werner Karl Schomburg
    Pages 223-236
  17. Werner Karl Schomburg
    Pages 237-247
  18. Werner Karl Schomburg
    Pages 249-275
  19. Werner Karl Schomburg
    Pages 277-299
  20. Werner Karl Schomburg
    Pages 301-302
  21. Werner Karl Schomburg
    Pages 303-311
  22. Werner Karl Schomburg
    Pages 313-325
  23. Werner Karl Schomburg
    Pages 327-338
  24. Werner Karl Schomburg
    Pages 339-353
  25. Werner Karl Schomburg
    Pages 355-362
  26. Back Matter
    Pages 363-374

About this book

Introduction

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

 

Keywords

Deflections of micro membranes and beams Electrostatic sensors and actuators Micro capillaries Microfluidic systems Piezoelectric sensors and actuators Strain gauges Thermal actuators

Authors and affiliations

  • Werner KarlĀ Schomburg
    • 1
  1. 1.Konstruktion und Entwicklung von Mikrosystemen (KEmikro)RWTH AachenAachenGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-47023-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 2015
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-662-47022-0
  • Online ISBN 978-3-662-47023-7
  • Series Print ISSN 1865-0899
  • Series Online ISSN 1865-0902
  • Buy this book on publisher's site
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