Abstract
The characteristic curves of different types of pressure sensors such as resistive, capacitive, frequency analog, and pressure balanced designs are calculated and advantages and application limits are explained.
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© 2015 Springer-Verlag Berlin Heidelberg
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Schomburg, W.K. (2015). Pressure Sensors. In: Introduction to Microsystem Design. RWTHedition. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47023-7_22
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DOI: https://doi.org/10.1007/978-3-662-47023-7_22
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47022-0
Online ISBN: 978-3-662-47023-7
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