Abstract
The characteristic curves of seat valves and slide valves are derived and conclusions are drawn for the necessary stroke and force required by the actuator. Valve types are compared with respect to achievable flow and maximum pressure difference. Several alternatives of micro valves and their specific properties are introduced. The influence of the dead volume on the switching time of valves and the flow characteristic of passive valves are calculated.
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© 2015 Springer-Verlag Berlin Heidelberg
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Schomburg, W.K. (2015). Micro Valves. In: Introduction to Microsystem Design. RWTHedition. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-47023-7_17
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DOI: https://doi.org/10.1007/978-3-662-47023-7_17
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-47022-0
Online ISBN: 978-3-662-47023-7
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