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Recent Advances in Instrumentation for Microprobe Analysis

  • Conference paper
Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse

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Abstract

While the most important examples of microprobe analysis have come from the use of an electron probe to produce excited states in the specimen and an X-ray analyzer to detect the radiative decay of these excited states, other forms of local excitation have also been used, for example, a focussed ion beam or a focussed or collimated photon beam. The signals that result from the local excitation can also assume many additional forms such as backscattered electrons, secondary electrons or ions, and optical radiation. Some of these signals obtained with electron beam excitation have been discussed in W. C. Nixon’s review paper at this conference [1].

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Author information

Authors and Affiliations

  1. Departments of Materials Science and Electrical Engineering, University of Southern California, Los Angeles, California, USA

    D. B. Wittry

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  1. D. B. Wittry
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Editor information

Editors and Affiliations

  1. Institut für angewandte Physik, Universität, 74 Tübingen, Germany

    G. Möllenstedt  & K. H. Gaukler  & 

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Wittry, D.B. (1969). Recent Advances in Instrumentation for Microprobe Analysis. In: Möllenstedt, G., Gaukler, K.H. (eds) Vth International Congress on X-Ray Optics and Microanalysis / V. Internationaler Kongreß für Röntgenoptik und Mikroanalyse / Ve Congrès International sur l’Optique des Rayons X et la Microanalyse. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-12108-5_31

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  • DOI: https://doi.org/10.1007/978-3-662-12108-5_31

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-12110-8

  • Online ISBN: 978-3-662-12108-5

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