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Epitaxy pp 81-129 | Cite as

Vapor Phase Epitaxy

  • Marian A. Herman
  • Wolfgang Richter
  • Helmut Sitter
Part of the Springer Series in MATERIALS SCIENCE book series (SSMATERIALS, volume 62)

Abstract

The various techniques of growing epitaxial layers from the vapor phase can be divided roughly into two categories depending on whether the species are transported physically or chemically from the source to the substrate.

Keywords

Chemical Vapor Deposition Glow Discharge Pulse Laser Deposition Epitaxial Growth Physical Vapor Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • Marian A. Herman
    • 1
  • Wolfgang Richter
    • 2
    • 3
  • Helmut Sitter
    • 4
  1. 1.Wissenschaftliches ZentrumPolnischen Akademie der WissenschaftenWienAustria
  2. 2.Institut für FestkörperphysikTechnische Universität BerlinBerlinGermany
  3. 3.INFM, Dipartimento di FisicaUniversità di Roma Tor VergataRomaItaly
  4. 4.Johannes-Kepler-UniversitätLinzAustria

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