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Acceleration and Angular Rate Sensors

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Mechanical Microsensors

Part of the book series: Microtechnology and MEMS ((MEMS))

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Abstract

Micromachined inertial sensors, consisting of acceleration and angular rate sensors are produced in large quantities mainly for automotive applications, where they are used to activate safety systems, including air bags, and to implement vehicle stability systems and electronic suspension. Besides these automotive applications accelerometers are used in many other applications where low cost and small size are important, e.g. in biomedical applications for activity monitoring and in consumer applications such as the active stabilization of camcorder pictures.

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© 2001 Springer-Verlag Berlin Heidelberg

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Elwenspoek, M., Wiegerink, R. (2001). Acceleration and Angular Rate Sensors. In: Mechanical Microsensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04321-9_7

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  • DOI: https://doi.org/10.1007/978-3-662-04321-9_7

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-08706-6

  • Online ISBN: 978-3-662-04321-9

  • eBook Packages: Springer Book Archive

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