Abstract
Packaging of microsensors presents special problems: part of the sensor requires environmental access while the rest may require protection from environmental influences. This is schematically illustrated in Fig. 11.1 (Senturia 1988). Due to this special role of the package, it is important that the package is designed simultaneously with the sensor. At the very least some time should be spent on examining the feasibility of a package. Otherwise, one may end up with a sensor that requires an extremely expensive package or cannot be packaged at all.
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© 2001 Springer-Verlag Berlin Heidelberg
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Elwenspoek, M., Wiegerink, R. (2001). Packaging. In: Mechanical Microsensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-04321-9_11
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DOI: https://doi.org/10.1007/978-3-662-04321-9_11
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-08706-6
Online ISBN: 978-3-662-04321-9
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