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Pulsed Laser-Plasma Deposition of Thin Films, and Film Structures

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Laser-Assisted Microtechnology

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 19))

Abstract

The pulsed laser-plasma method is a novel, fast-developing technique for the synthesis of polycomponent thin-film materials and structures [8.1–6].

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Authors and Affiliations

  1. BIAS Bremen Institute of Applied Beam Technology, Klagenfurter Str. 2, D-28359, Bremen, Germany

    Professor Dr. Simeon M. Metev

  2. IFMO Institute of Fine Mechanics and Optics, Sablinskaya 14, 197101 St. Petersburg, Russia

    Professor Dr. Vadim P. Veiko

Authors
  1. Professor Dr. Simeon M. Metev
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  2. Professor Dr. Vadim P. Veiko
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Metev, S.M., Veiko, V.P. (1998). Pulsed Laser-Plasma Deposition of Thin Films, and Film Structures. In: Laser-Assisted Microtechnology. Springer Series in Materials Science, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-97327-7_8

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  • DOI: https://doi.org/10.1007/978-3-642-97327-7_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-97329-1

  • Online ISBN: 978-3-642-97327-7

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