Laser-Assisted Microtechnology

  • Simeon M. Metev
  • Vadim P. Veiko

Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)

Table of contents

  1. Front Matter
    Pages I-XII
  2. Simeon M. Metev, Vadim P. Veiko
    Pages 1-5
  3. Simeon M. Metev, Vadim P. Veiko
    Pages 6-33
  4. Simeon M. Metev, Vadim P. Veiko
    Pages 34-99
  5. Simeon M. Metev, Vadim P. Veiko
    Pages 100-131
  6. Simeon M. Metev, Vadim P. Veiko
    Pages 132-156
  7. Simeon M. Metev, Vadim P. Veiko
    Pages 157-186
  8. Simeon M. Metev, Vadim P. Veiko
    Pages 187-227
  9. Simeon M. Metev, Vadim P. Veiko
    Pages 228-246
  10. Back Matter
    Pages 247-272

About this book

Introduction

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

Keywords

Laser Microtechnology Microprocessing Microtechnology ablation analog circuit design electromagnetic wave energy integrated circuit model phase polymer semiconductor thin films

Authors and affiliations

  • Simeon M. Metev
    • 1
  • Vadim P. Veiko
    • 2
  1. 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
  2. 2.IFMO Institute of Fine Mechanics and OpticsSablinskaya 14Russia

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-97327-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 1994
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-97329-1
  • Online ISBN 978-3-642-97327-7
  • Series Print ISSN 0933-033X
  • Series Online ISSN 2196-2812
  • About this book
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