Laser-Assisted Microtechnology
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 19)
About this book
Introduction
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Keywords
Laser Microtechnology Microprocessing Microtechnology ablation analog circuit design electromagnetic wave energy integrated circuit model phase polymer semiconductor thin films
Bibliographic information
- DOI https://doi.org/10.1007/978-3-642-97327-7
- Copyright Information Springer-Verlag Berlin Heidelberg 1994
- Publisher Name Springer, Berlin, Heidelberg
- eBook Packages Springer Book Archive
- Print ISBN 978-3-642-97329-1
- Online ISBN 978-3-642-97327-7
- Series Print ISSN 0933-033X
- Series Online ISSN 2196-2812
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