About this book
Introduction
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Keywords
Laser Microtechnology Microprocessing Microtechnology ablation analog circuit design electromagnetic wave energy integrated circuit model phase polymer semiconductor thin films
Authors and affiliations
- Simeon M. Metev
- Vadim P. Veiko
- 1.BIAS Bremen Institute of Applied Beam TechnologyBremenGermany
- 2.IFMO Institute of Fine Mechanics and OpticsSablinskaya 14Russia
Bibliographic information