Ion Pair Production as Main Process of SIMS for Inorganic Solids

  • C. Plog
  • G. Roth
  • W. Gerhard
  • W. Kerfin
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 44)

Abstract

A model of secondary ion emission was proposed [1–3] stating that neutrally emitted molecules dissociate into ion pairs above the surface. A schematic view of this process is shown in Fig. 1.

Keywords

Auger 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1986

Authors and Affiliations

  • C. Plog
    • 1
  • G. Roth
    • 1
  • W. Gerhard
    • 1
  • W. Kerfin
    • 1
  1. 1.Department NTFGDornier System GmbHFriedrichhafenGermany

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