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Use of a Compact Cs Gun Together with a Liquid Metal Ion Source for High Sensitivity Submicron SIMS

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Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

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Abstract

Ion microprobe SIMS by means of positive or negative secondary ions from the specimen surface offers a very high sensitivity not only in surface analysis but in depth profiling also, allowing vast application to solids including biological samples. Particularly for electronegative elements, it is very effective to bombard the specimen surface with Cs ions to get negative secondary ions. Conventional ion bombardment under Cs flooding is also known as an alternative.

Dr. Tsuyoshi Okutani, the first author who had devoted himself to this study, suddenly died of pneumonia during the process of severe treatment agaist acute leukaemia, as young as 34 years old, on July 13, 1985.

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References

  1. M. Bernheim, J. Rebiere and G. Slodzian: SIMS-II, Ed. by A. Benninghoven, C.A. Evans, Jr., R.A. Powell, R. Shimizu and H.A. Storms, Springer-Verlag, (1979) p. 40

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  2. T. Okutani and R. Shimizu: ibid, p.186

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  3. M. L. Yu: SIMS-IV, Ed. by A. Benninghoven, J. Okano, R. Shimizu and H.W. Werner, Springer-Verlag, (1984) p. 60

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  4. T. Okutani, M. Fukuda, T. Noda, H. Tamura, H. Watanabe and C. Shepherd: J. Vac. Sci. Tech. B1 (4), 1145 (1983)

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Author information

Authors and Affiliations

  1. Toyohashi Univ. of Technol., Tempaku, Toyohashi 440, Japan

    Dr. Tsuyoshi Okutani, T. Shinomiya, M. Ohshima & T. Noda

  2. Hitachi Central Research Lab., Kokubunji, Tokyo 185, Japan

    H. Tamura & H. Watanabe

Authors
  1. Dr. Tsuyoshi Okutani
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  2. T. Shinomiya
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  3. M. Ohshima
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  4. T. Noda
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  5. H. Tamura
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  6. H. Watanabe
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

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© 1986 Springer-Verlag Berlin Heidelberg

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Okutani, T., Shinomiya, T., Ohshima, M., Noda, T., Tamura, H., Watanabe, H. (1986). Use of a Compact Cs Gun Together with a Liquid Metal Ion Source for High Sensitivity Submicron SIMS. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_32

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  • DOI: https://doi.org/10.1007/978-3-642-82724-2_32

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

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