Abstract
Quantitative analysis of single matrix materials using the ion microprobe mode of SIMS analysis is now routinely achieved using empirical standards. Quantification in multilayer/multimatrix specimens has also been realized in recent years (1). However, ion imaging based on SIMS has been chiefly qualitative in nature due to artifacts in the SIMS measurement. Among these, the inability to precisely calibrate ionization probability variations due to matrix composition variation over an ion image field is probably the most difficult variable to account for. This is true because precise matrix composition from pixel is seldom known with sufficient accuracy to allow fabrication of external standards.
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References
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© 1986 Springer-Verlag Berlin Heidelberg
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Brenna, J.T., Morrison, G.H. (1986). Matrix Effects in the Quantitative Elemental Analysis of Plastic-Embedded and Ashed Biological Tissue by SIMS. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_29
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DOI: https://doi.org/10.1007/978-3-642-82724-2_29
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