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Electron Gas SNMS

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Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

Abstract

Though the secondary ions ejected from an ion bombarded solid surface are immediately available for mass spectrometric detection, surface analysis by sputtered secondary neutral particles offers several essential advantages compared to SIMS. This justifies the additional experimental complications connected with appropriate postionization techniques that are prerequisite for Secondary Neutral Mass Spectrometry SNMS.

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References

  1. H. Oechsner: Thin Film and Depth Profile Analysis, ed. H. Oechsner, Springer 1984, p. 63

    Google Scholar 

  2. K.H. Müller and H. Oechsner: Microchim. Acta Supp. 10, 51 (1983)

    Google Scholar 

  3. H. Oechsner, W. Rühe and E. Stumpe: Surface Sci. 85, 289 (1979)

    Article  ADS  Google Scholar 

  4. H. Oechsner: SIMS III, ed. A. Benninghoven et al. Springer 1982, p. 106

    Google Scholar 

  5. R.E. Honig: J. Appl. Phys. 29, 549 (1958)

    Article  ADS  Google Scholar 

  6. H. Oechsner: Nucl. Instr. Mh. Phys. Res. B, in print

    Google Scholar 

  7. H. Oechsner: Appl. Phys. 8, 185 (1975)

    Article  ADS  Google Scholar 

  8. A. Benninghoven: Surface Sci. 53, 596 (1975)

    Article  ADS  Google Scholar 

  9. H. Oechsner: Plasma Physics 16, 835 (1974)

    Article  ADS  Google Scholar 

  10. E. Stumpe, H. Oechsner and H Schoof: Appl. Phys. 20, 55 (1979)

    Article  ADS  Google Scholar 

  11. H. Oechsner, H. Paulus and P. Beckmann: J. Vac. Sci Techn. A3, 1403 (1985)

    Article  ADS  Google Scholar 

  12. K.H. Müller, K. Seifert and M. Wilmers: J. Vac. Sci. Techn. A3, 1367 (1985)

    Article  ADS  Google Scholar 

  13. K.H. Müller: unpublished results

    Google Scholar 

  14. H. Oechsner, G. Bachmann, P. Beckmann, D.A. Reed, S.M. Baumann, S.D. Wilson, C.A. Evans Jr.: this conference

    Google Scholar 

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Author information

Authors and Affiliations

  1. Fachbereich Physik, Universität Kaiserslautern, Sonderforschungsbereich 91, D-6750, Kaiserslautern, Germany

    H. Oechsner

Authors
  1. H. Oechsner
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

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© 1986 Springer-Verlag Berlin Heidelberg

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Oechsner, H. (1986). Electron Gas SNMS. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_16

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  • DOI: https://doi.org/10.1007/978-3-642-82724-2_16

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

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