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Time-of-Flight Measurements in Secondary Ion Mass Spectrometry

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Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

Abstract

In recent years a number of mass spectrometers have been constructed for measuring the mass spectra of secondary ions by time-of-flight methods [1]. References The secondary ions may be produced by bombardment of the sample with high energy (MeV) primary ions [2] or with low-energy (keV) ions. Instruments using both low-energy ion bombardment (SIMS) and time-of-flight (TOF) are listed in table 1.

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References

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Author information

Author notes

  1. G. Bolbach

    Present address: Insititut Curie, Paris, France

Authors and Affiliations

  1. Physics Department, University of Manitoba, Winnipeg, Canada

    K. G. Standing, R. Beavis, G. Bolbach, W. Ens, D. E. Main & B. Schueler

Authors
  1. K. G. Standing
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  2. R. Beavis
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  3. G. Bolbach
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  4. W. Ens
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  5. D. E. Main
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  6. B. Schueler
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

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© 1986 Springer-Verlag Berlin Heidelberg

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Standing, K.G., Beavis, R., Bolbach, G., Ens, W., Main, D.E., Schueler, B. (1986). Time-of-Flight Measurements in Secondary Ion Mass Spectrometry. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_126

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  • DOI: https://doi.org/10.1007/978-3-642-82724-2_126

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

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