Abstract
The Solidly Mounted Resonator (SMR) is another kind of FBAR. Bragg acoustic reflector, which is composed of a sequence of a quarter wavelength thick layers of low and high acoustic impedance, is formed under the piezoelectric stack to clamp the acoustic wave energy. In this chapter, the structure design theory, simulation of frequency response and fabricated devices with the Bragg reflector of Mo/AlN, Mo/Ti and W/Ti were discussed. A mode of transmission line was introduced to describe the behavior of the SMR. In order to obtain a high quality AlN film, the texture and the stress of multilayer film were investigated. The frequency response of the SMR with AlN/Mo, Mo/Ti and W/Ti exhibit the resonance at 1.916, 2.085 and 2.48 GHz, respectively. The devices with all reflectors show improved Q factor compared to that of AlN/Mo device.
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© 2013 Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg
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Zhang, Y., Chen, D. (2013). Solidly Mounted Acoustic Resonator. In: Multilayer Integrated Film Bulk Acoustic Resonators. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31776-7_6
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DOI: https://doi.org/10.1007/978-3-642-31776-7_6
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