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Multilayer Integrated Film Bulk Acoustic Resonators

  • Yafei Zhang
  • Da Chen

Table of contents

  1. Front Matter
    Pages i-x
  2. Yafei Zhang, Da Chen
    Pages 1-14
  3. Yafei Zhang, Da Chen
    Pages 15-29
  4. Yafei Zhang, Da Chen
    Pages 31-50
  5. Yafei Zhang, Da Chen
    Pages 51-69
  6. Yafei Zhang, Da Chen
    Pages 71-80
  7. Yafei Zhang, Da Chen
    Pages 81-95
  8. Yafei Zhang, Da Chen
    Pages 97-108
  9. Yafei Zhang, Da Chen
    Pages 109-124
  10. Yafei Zhang, Da Chen
    Pages 125-149
  11. Back Matter
    Pages 151-152

About this book

Introduction

Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.

Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.

Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Keywords

Device Theory and Design Principle Film Bulk Acoustic Resonator Micro-nano Manufacturing Microelectronic Device Multilayer Integration Sensors and Actuators

Authors and affiliations

  • Yafei Zhang
    • 1
  • Da Chen
    • 2
  1. 1.Research Inst. Micro/Nano, Science & TechnologyShanghai Jiao Tong UniversityShanghaiChina, People's Republic
  2. 2., Research Institute of Micro/Nano S&TShanghai Jiao Tong UniversityShanghaiChina, People's Republic

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-31776-7
  • Copyright Information Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg 2013
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-642-31775-0
  • Online ISBN 978-3-642-31776-7
  • Buy this book on publisher's site
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