Abstract
The electromagnetic design of microactuators differs significantly from that of conventional motors in at least two respects: The use of microfabrication allows the design of completely new topologies of the active part that could not – or not economically – be manufactured from currently used iron and copper wire. However, the physical properties of micro-manufactured magnetic materials can differ significantly from those of conventional iron lamination or permanent magnets. The laws of growth have certain consequences to be taken into account when designing microactuators: For example, the influences of mechanical friction and the ohmic resistance of the windings are of increasing importance. This chapter thus focuses on the special design rules that apply for microactuators as well as on the advantages and disadvantages of different electromagnetic designs.
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Janssen, G., Gehrking, R., Edler, J., Ponick, B., Stölting, HD. (2011). Electromagnetic Design of Microactuators. In: Büttgenbach, S., Burisch, A., Hesselbach, J. (eds) Design and Manufacturing of Active Microsystems. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12903-2_2
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DOI: https://doi.org/10.1007/978-3-642-12903-2_2
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