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Design and Manufacturing of Active Microsystems

  • Stephanus Büttgenbach
  • Arne Burisch
  • Jürgen Hesselbach

Part of the Microtechnology and MEMS book series (MEMS)

Table of contents

  1. Front Matter
    Pages i-xii
  2. S. Büttgenbach, A. Burisch
    Pages 1-7
  3. Design and Construction

    1. Front Matter
      Pages 9-9
    2. G. Janssen, R. Gehrking, J. Edler, B. Ponick, H.-D. Stölting
      Pages 11-28
    3. V. Ganesan, K. Wiedmann, A. Beradinelli, S. Demmig, H.-D. Stölting, A. Mertens
      Pages 29-47
    4. U. Triltsch, U. Hansen, C. Boese, J. R. Ziebart, H.-J. Franke, T. Vietor et al.
      Pages 49-66
  4. Guiding and Measuring in Active Microsystems

    1. Front Matter
      Pages 67-67
    2. R. Bandorf, F. Pape, H. H. Gatzen, G. Bräuer
      Pages 69-88
    3. A. Phataralaoha, R. Bandorf, G. Bräuer, S. Büttgenbach
      Pages 89-108
    4. H. Kayapinar, H.-C. Möhring, B. Denkena
      Pages 109-126
    5. A. Kornfeld, C. Kolleck, A. Ostendorf
      Pages 127-144
    6. S. Bütefisch, U. Brand, L. Doering, G. Dai, L. Koenders, G. Wilkening
      Pages 145-164
  5. Manufacturing and Fabrication

    1. Front Matter
      Pages 165-165
    2. J. Chen, C. Ruffert, H. H. Gatzen, R. Bandorf, G. Bräuer
      Pages 167-188
    3. F. Pape, A. Waldschik, C. Ruffert, O. Traisigkhachol, M. Feldmann, T. Kohlmeier et al.
      Pages 189-206
    4. A. Waldschik, M. Feldmann, V. Seidemann, S. Büttgenbach
      Pages 207-224
    5. D. Hahmann, M. Rüggeberg, R. Wittmer, M. Reichstein, M. Hlavac, B. Denkena et al.
      Pages 245-266
  6. Microassembly

    1. Front Matter
      Pages 267-267
    2. J. Ellwood, A. Burisch, K. Schöttler, G. Pokar, A. Raatz, J. Hesselbach
      Pages 269-286
    3. B. Hoxhold, J. Wrege, S. Bütefisch, A. Burisch, A. Raatz, J. Hesselbach et al.
      Pages 287-308
    4. C. Keck, M. Berndt, R. Tutsch
      Pages 309-326
    5. G. Hemken, S. Böhm, K. Dilger
      Pages 327-343
    6. S. Rathmann, J. Ellwood, A. Raatz, J. Hesselbach
      Pages 345-364
    7. S. Rathmann, S. Hansen, A. Raatz, H. H. Gatzen
      Pages 365-371
  7. Industrial Applications

    1. Front Matter
      Pages 373-373
    2. A. Balck, C. Kirsch, U. Schmid, H. Seidel, M. Leester-Schädel, S. Büttgenbach
      Pages 375-392
    3. A. Burisch, S. Deumlich, R. Degen, A. Raatz, J. Hesselbach
      Pages 393-409
    4. D. Gnieser, R. Tutsch
      Pages 411-422
  8. Back Matter
    Pages 441-444

About this book

Introduction

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Keywords

TCAD Technical CAD UV-depth lithography magnetic microsystems mechanical micromaching microactuators microassembly microelectroplating micrometrology micromotors microrobots microtribology miniaturized handling devices

Editors and affiliations

  • Stephanus Büttgenbach
    • 1
  • Arne Burisch
    • 2
  • Jürgen Hesselbach
    • 3
  1. 1.FB 7 Maschinenbau, LS MikrotechnikTU BraunschweigBraunschweigGermany
  2. 2.Inst. Werkzeugmaschinen und, FertigungstechnikTU BraunschweigBraunschweigGermany
  3. 3., Institut für WerkzeugmaschinenTechnische Universität BraunschweigBraunschweigGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-12903-2
  • Copyright Information Springer-Verlag Berlin Heidelberg 2011
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-642-12902-5
  • Online ISBN 978-3-642-12903-2
  • Series Print ISSN 1615-8326
  • Buy this book on publisher's site
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