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Modelling and Optimization of Inertial Sensor-Accelerometer

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Outlook and Challenges of Nano Devices, Sensors, and MEMS

Abstract

This book chapter presents the modelling and optimization details of a Micromachined (MEMS) dual-axis accelerometer. After providing detailed review of existing and proposed applications of these inertial sensors, the chapter introduces various present-day accelerometers available in the literature. The major challenges faced by the accelerometer sensors designs are minimization of the device foot print, noise floor, and cross-axis sensitivity. As dual axis accelerometers are designed to work in both x- and y- (in-plane) directions, they became prone to cross-coupling between the in-plane and the out of the plane (Z-axis) direction. This is due to the structural design that makes them sensitive to other cross-axis acceleration. In most of the design mode-cross-coupling occurs with Z-direction. Moreover, low stiffness in Z-axis causes the proof-mass to sag due to gravity. The present design is modelled according to the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The designed accelerometer consist of a square proof mass suspended using crab leg springs. Primary focus is given to have high differential capacitance sensitivity in small foot print of 1.5 × 1.5 mm. Also, to reduce cross-axis sensitivity and to reduce mode coupling between in-plane modes and Z-axis mode. Simulation results show that the differential capacitive sensitivity of 59 fF/g. The device achieves a mode separation of 10 kHz between the in-plane and out-of-the plane modes. The average cross-axis sensitivity in XY is 1.33% and cross-axis sensitivity due to Z-axis acceleration is zero.

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Acknowledgement

This work was funded by Mubadala Development Company–Abu Dhabi, Economic Development Board–Singapore and GLOBALFOUNDRIES–Singapore under the framework of ‘Twinlab’ project with participation of A*STAR Institute of Microelectronics–Singapore (IME), Masdar Institute of Science and Technology–Abu Dhabi and GLOBALFOUNDRIES–Singapore. Further, we would like to acknowledge Mr. Aveek Chatterjee of GlobalFoundries for design evaluations, and IME’s Dr. Peter Kee and Dr. Ilker Ocak for all the support they have provided us with standard cells, design reviews, and process information.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Masdar Institute of Science and Technology, Abu Dhabi, UAE

    Zakriya Mohammed, Waqas Amin Gill & Mahmoud Rasras

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  1. Zakriya Mohammed
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  2. Waqas Amin Gill
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  3. Mahmoud Rasras
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Correspondence to Zakriya Mohammed .

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Editors and Affiliations

  1. State Key Lab of Electronic Thin Film & Integrated Device, University of Electronic Science & Technology of China, Chengdu, China

    Ting Li

  2. Microelectronics & Solid-state Electronics College, University of Electronic Science & Technology of China, Chengdu, China

    Ziv Liu

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Mohammed, Z., Gill, W.A., Rasras, M. (2017). Modelling and Optimization of Inertial Sensor-Accelerometer. In: Li, T., Liu, Z. (eds) Outlook and Challenges of Nano Devices, Sensors, and MEMS. Springer, Cham. https://doi.org/10.1007/978-3-319-50824-5_11

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  • DOI: https://doi.org/10.1007/978-3-319-50824-5_11

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-50822-1

  • Online ISBN: 978-3-319-50824-5

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